Authors:
- Compares nanofabrication technologies, including their capabilities and limitations, in a consistent, reader-friendly manner
- Contains in-depth discussions on optical lithography and electron beam lithography, based on the author’s experience having developed simulation programs for each
- Presents practical information and examples, drawn from both primary research and industrial applications, which readers can use in realistic situations and for trouble-shooting
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Table of contents (11 chapters)
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Front Matter
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Back Matter
About this book
Authors and Affiliations
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Suzhou Institute of Nano-Tech and Nano-Nanobionics (SINANO), Suzhou, China
Zheng Cui
About the author
Bibliographic Information
Book Title: Nanofabrication
Book Subtitle: Principles, Capabilities and Limits
Authors: Zheng Cui
DOI: https://doi.org/10.1007/978-3-319-39361-2
Publisher: Springer Cham
eBook Packages: Engineering, Engineering (R0)
Copyright Information: Springer International Publishing Switzerland 2017
Hardcover ISBN: 978-3-319-39359-9Published: 12 September 2016
Softcover ISBN: 978-3-319-81875-7Published: 20 June 2018
eBook ISBN: 978-3-319-39361-2Published: 10 August 2016
Edition Number: 2
Number of Pages: XVII, 432
Number of Illustrations: 266 b/w illustrations, 50 illustrations in colour
Topics: Nanotechnology and Microengineering, Solid Mechanics, Circuits and Systems, Classical Electrodynamics