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  • © 2016

Nanofabrication

Principles and Applications

Part of the book series: SpringerBriefs in Materials (BRIEFSMATERIALS)

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Table of contents (8 chapters)

  1. Front Matter

    Pages i-vi
  2. Introduction

    • Christo Papadopoulos
    Pages 1-5
  3. Silicon Planar Processing and Photolithography

    • Christo Papadopoulos
    Pages 7-14
  4. Direct-Write Lithography Approaches

    • Christo Papadopoulos
    Pages 15-21
  5. Stamping Methods

    • Christo Papadopoulos
    Pages 23-28
  6. Scanning-Probe Methods

    • Christo Papadopoulos
    Pages 29-35
  7. Natural Lithography

    • Christo Papadopoulos
    Pages 37-44
  8. Direct-Growth and Self-assembly

    • Christo Papadopoulos
    Pages 45-61

About this book

This book provides an overview of the techniques and tools of nanostructure fabrication from state-of-the-art lithography to emerging self-assembly approaches. Top-down and bottom-up methodologies along with hybrid approaches are used to illustrate the fabrication of structures including integrated circuits, semiconductor quantum dots, metallic nanoparticles, carbon nanotubes, molecular structures, nanocomposites, arrays and superstructures. Nanofabrication applications in nanoelectronics, biotechnology, nanomechanical devices and nanophotonics will be examined. This brief will present the core concepts of nanofabrication relevant to researchers and industry in this important and rapidly evolving area.

Authors and Affiliations

  • Victoria, Canada

    Christo Papadopoulos

Bibliographic Information

Buy it now

Buying options

eBook USD 39.99
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book USD 54.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Other ways to access