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Nanopositioning Technologies

Fundamentals and Applications

  • Book
  • © 2016

Overview

Editors:
  1. Changhai Ru

    1. Harbin Engineering University, Harbin, China

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    You can also search for this editor in PubMed   Google Scholar

  2. Xinyu Liu

    1. McGill University Mechanical Engineering, Montreal, Canada

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    You can also search for this editor in PubMed   Google Scholar

  3. Yu Sun

    1. Univ Toronto Dept Electrical & Comput, Toronto, Canada

    View editor publications

    You can also search for this editor in PubMed   Google Scholar

  • Enriches understanding of the latest fundamentals and applications of nanopositioning technologies
  • Maximizes reader insights into design/modeling/control of nanopositioning systems, nanomanipulation under scanning electron microscopes and nanopositioning for semiconductor inspection
  • Reviews comprehensively key recent research into nanopositioner design, sensors, actuators, controls and emerging applications

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Table of contents (12 chapters)

  1. Front Matter

    Pages i-vi
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  2. A Review of Stick–Slip Nanopositioning Actuators

    • Peng Pan, Feiyu Yang, Zhenhua Wang, Bowen Zhong, Lining Sun, Changhai Ru
    Pages 1-32

  3. Piezoelectric Motor Technology: A Review

    • Amro Shafik, Ridha Ben Mrad
    Pages 33-59

  4. Mechanical Design of High-Speed Nanopositioning Systems

    • Yuen Kuan Yong, Kam K. Leang
    Pages 61-121

  5. Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism

    • Sicong Wan, Qingsong Xu
    Pages 123-150

  6. Electro-Magnetic Nano-Positioning

    • Zhuo Zhang, Yueqing Yu, Xinyu Liu, Xuping Zhang
    Pages 151-181

  7. Modeling of Piezoelectric-Actuated Nanopositioning Stages Involving with the Hysteresis

    • Guo-Ying Gu, Li-Min Zhu, Chun-Yi Su, Han Ding
    Pages 183-212

  8. Tracking Control for Nanopositioning Systems

    • Kam K. Leang, Andrew J. Fleming
    Pages 213-244

  9. Position Sensors for Nanopositioning

    • Andrew J. Fleming, Kam K. Leang
    Pages 245-294

  10. MEMS Nanopositioners

    • Jason J. Gorman
    Pages 295-324

  11. Control Issues of MEMS Nanopositioning Devices

    • Y. Zhu, S. O. R. Moheimani, M. R. Yuce, A. Bazaei
    Pages 325-346

  12. A Review of Nanomanipulation in Scanning Electron Microscopes

    • Devin K. Luu, Chaoyang Shi, Yu Sun
    Pages 347-379

  13. Nanopositioning for Lithography and Data Storage

    • Wenbo Zhang, Ming Pang, Changhai Ru
    Pages 381-409
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Keywords

About this book

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

Editors and Affiliations

  • Harbin Engineering University, Harbin, China

    Changhai Ru

  • McGill University Mechanical Engineering, Montreal, Canada

    Xinyu Liu

  • Univ Toronto Dept Electrical & Comput, Toronto, Canada

    Yu Sun

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