Authors:
- Enriches understanding of precision control theory
- Explains the complete process of nanopositioning control including practical difficulties and their solution
- Reinforces basic principles with experimental application in atomic force microscope
Part of the book series: Advances in Industrial Control (AIC)
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Table of contents (14 chapters)
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Front Matter
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Back Matter
About this book
Covering the complete design cycle of nanopositioning systems, this is the first comprehensive text on the topic. The book first introduces concepts associated with nanopositioning stages and outlines their application in such tasks as scanning probe microscopy, nanofabrication, data storage, cell surgery and precision optics. Piezoelectric transducers, employed ubiquitously in nanopositioning applications are then discussed in detail including practical considerations and constraints on transducer response. The reader is then given an overview of the types of nanopositioner before the text turns to the in-depth coverage of mechanical design including flexures, materials, manufacturing techniques, and electronics. This process is illustrated by the example of a high-speed serial-kinematic nanopositioner. Position sensors are then catalogued and described and the text then focuses on control.
Several forms of control are treated: shunt control, feedback control, force feedback control and feedforward control (including an appreciation of iterative learning control). Performance issues are given importance as are problems limiting that performance such as hysteresis and noise which arise in the treatment of control and are then given chapter-length attention in their own right. The reader also learns about cost functions and other issues involved in command shaping, charge drives and electrical considerations. All concepts are demonstrated experimentally including by direct application to atomic force microscope imaging.
Design, Modeling and Control of Nanopositioning Systems will be of interest to researchers in mechatronics generally and in control applied to atomic force microscopy and other nanopositioning applications. Microscope developers and mechanical designers of nanopositioning devices will find the text essential reading.
Authors and Affiliations
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School of Engineering and Computer Science, University of Newcastle, Callaghan, Australia
Andrew J. Fleming
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Mechanical Engineering, University of Nevada, Reno, Reno, USA
Kam K. Leang
About the authors
Dr. Leang, is an Associate Professor of Mechanical Engineering at the University of Nevada-Reno, Nevada. His research includes the modeling and control of piezo actuators for scanning probe microscopy, fabrication and control of electroactive polymers, and the design of microelectromechanical systems (MEMS) for nanotechnology.
Bibliographic Information
Book Title: Design, Modeling and Control of Nanopositioning Systems
Authors: Andrew J. Fleming, Kam K. Leang
Series Title: Advances in Industrial Control
DOI: https://doi.org/10.1007/978-3-319-06617-2
Publisher: Springer Cham
eBook Packages: Engineering, Engineering (R0)
Copyright Information: Springer International Publishing Switzerland 2014
Hardcover ISBN: 978-3-319-06616-5Published: 03 June 2014
Softcover ISBN: 978-3-319-35438-5Published: 03 September 2016
eBook ISBN: 978-3-319-06617-2Published: 15 May 2014
Series ISSN: 1430-9491
Series E-ISSN: 2193-1577
Edition Number: 1
Number of Pages: XVI, 411
Number of Illustrations: 81 b/w illustrations, 180 illustrations in colour
Topics: Control and Systems Theory, Mechatronics, Manufacturing, Machines, Tools, Processes, Industrial and Production Engineering