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Subsecond Annealing of Advanced Materials

Annealing by Lasers, Flash Lamps and Swift Heavy Ions

  • Book
  • © 2014

Overview

Editors:
  1. Wolfgang Skorupa

    1. Inst. Ionenstrahlphysik und Materialforschung, Abt. Neue Materialien, Helmholtz-Zentrum Dresden-Rossendorf, Dresden, Germany

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  2. Heidemarie Schmidt

    1. Materialsysteme der Nanoelektronik Nano-Spintronics Group, Chemnitz University of Technology, Chemnitz, Germany

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  • Written by leading researchers in the field
  • Describes annealing-related processes in semiconductor technology
  • Includes a broad range of examples
  • Includes supplementary material: sn.pub/extras

Part of the book series: Springer Series in Materials Science (SSMATERIALS, volume 192)

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Table of contents (15 chapters)

  1. Front Matter

    Pages I-XVII
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  2. Historical Aspects of Subsecond Thermal Processing

    • Matthias Voelskow, Rossen A. Yankov, Wolfgang Skorupa
    Pages 1-13

  3. Nanonet Formation by Constitutional Supercooling of Pulsed Laser Annealed, Mn-Implanted Germanium

    • Danilo Bürger, Shengqiang Zhou, Marcel Höwler, Xin Ou, György J. Kovacs, Helfried Reuther et al.
    Pages 15-33

  4. Metastable Activation of Dopants by Solid Phase Epitaxial Recrystallisation

    • R. Duffy
    Pages 35-56

  5. Superconducting Gallium Implanted Germanium

    • J. Fiedler, V. Heera
    Pages 57-78

  6. Structural Changes in SiGe/Si Layers Induced by Fast Crystallization

    • P. I. Gaiduk, S. L. Prakopyeu
    Pages 79-105

  7. Sub-nanosecond Thermal Spike Induced Nanostructuring of Thin Solid Films Under Swift Heavy Ion (SHI) Irradiation

    • S. Ghosh, H. Kumar, S. P. Singh, P. Srivastava, D. Kabiraj, D. K. Avasthi et al.
    Pages 107-121

  8. Pulsed-Laser-Induced Epitaxial Growth of Silicon for Three-Dimensional Integrated Circuits

    • Ryoichi Ishihara, M. R. Tajari Mofrad, Ming He, C. I. M. Beenakker
    Pages 123-138

  9. Improvement of Performance and Cost of Functional Films Using Large Area Laser RTP

    • Vitalij Lissotschenko, Dirk Hauschild
    Pages 139-153

  10. Pulsed Laser Dopant Activation for Semiconductors and Solar Cells

    • Peter Oesterlin
    Pages 155-171

  11. Formation of High-Quality μm-Order-Thick Poly-Si Films on Glass-Substrates by Flash Lamp Annealing

    • Keisuke Ohdaira
    Pages 173-187

  12. Millisecond-Range Liquid-Phase Processing of Silicon-Based Hetero-nanostructures

    • S. Prucnal, W. Skorupa
    Pages 189-210

  13. Radiation Thermometry—Sources of Uncertainty During Contactless Temperature Measurement

    • Denise Reichel, T. Schumann, W. Skorupa, W. Lerch, J. Gelpey
    Pages 211-228

  14. Millisecond Annealing for Semiconductor Device Applications

    • P. J. Timans, G. Xing, J. Cibere, S. Hamm, S. McCoy
    Pages 229-270

  15. Low-Cost and Large-Area Electronics, Roll-to-Roll Processing and Beyond

    • Katarzyna Wiesenhütter, Wolfgang Skorupa
    Pages 271-295

  16. Application of Sub-second Annealing for Diluted Ferromagnetic Semiconductors

    • Shengqiang Zhou, Danilo Bürger, Heidemarie Schmidt
    Pages 297-314

  17. Back Matter

    Pages 315-321
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Keywords

About this book

The thermal processing of materials ranges from few fem to seconds by Swift Heavy Ion Implantation to about one second using advanced Rapid Thermal Annealing. This book offers after an historical excursus selected contributions on fundamental and applied aspects of thermal processing of classical elemental semiconductors and other advanced materials including nanostructures with novel optoelectronic, magnetic, and superconducting properties. Special emphasis is given on the diffusion and segregation of impurity atoms during thermal treatment. A broad range of examples describes the solid phase and/or liquid phase processing of elemental and compound semiconductors, dielectric composites and organic materials.

Editors and Affiliations

  • Inst. Ionenstrahlphysik und Materialforschung, Abt. Neue Materialien, Helmholtz-Zentrum Dresden-Rossendorf, Dresden, Germany

    Wolfgang Skorupa

  • Materialsysteme der Nanoelektronik Nano-Spintronics Group, Chemnitz University of Technology, Chemnitz, Germany

    Heidemarie Schmidt

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