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Toward Inertial-Navigation-on-Chip

The Physics and Performance Scaling of Multi-Degree-of-Freedom Resonant MEMS Gyroscopes

  • Book
  • © 2019

Overview

Authors:
  1. Haoran Wen

    1. School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, USA

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  • Nominated as an outstanding PhD thesis by Georgia Institute of Technology
  • Provides an accessible introduction to resonator gyroscopes
  • Presents insights that increase understanding of bias instability in resonant gyroscope technology
  • Demonstrates a new processing technique which overcomes limitations of current gyroscopes

Part of the book series: Springer Theses (Springer Theses)

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Table of contents (7 chapters)

  1. Front Matter

    Pages i-xiii
    Download chapter PDF

  2. Introduction

    • Haoran Wen
    Pages 1-12

  3. The Physics of Resonant MEMS Gyroscopes

    • Haoran Wen
    Pages 13-34

  4. Bias Control in Pitch and Roll Gyroscopes

    • Haoran Wen
    Pages 35-57

  5. Scale-Factor Enhancement

    • Haoran Wen
    Pages 59-75

  6. Integrated Inertial Measurement Unit

    • Haoran Wen
    Pages 77-85

  7. Bias Stability Limit in Resonant Gyroscopes

    • Haoran Wen
    Pages 87-103

  8. Conclusions and Future Work

    • Haoran Wen
    Pages 105-110

  9. Back Matter

    Pages 111-127
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Keywords

About this book

This thesis develops next-generation multi-degree-of-freedom gyroscopes and inertial measurement units (IMU) using micro-electromechanical-systems (MEMS) technology. It covers both a comprehensive study of the physics of resonator gyroscopes and novel micro/nano-fabrication solutions to key performance limits in MEMS resonator gyroscopes. Firstly, theoretical and experimental studies of physical phenomena including mode localization, nonlinear behavior, and energy dissipation provide new insights into challenges like quadrature errors and flicker noise in resonator gyroscope systems. Secondly, advanced designs and micro/nano-fabrication methods developed in this work demonstrate valuable applications to a wide range of MEMS/NEMS devices. In particular, the HARPSS+ process platform established in this thesis features a novel slanted nano-gap transducer, which enabled the first wafer-level-packaged single-chip IMU prototype with co-fabricated high-frequency resonant triaxial gyroscopes and high-bandwidth triaxial micro-gravity accelerometers. This prototype demonstrates performance amongst the highest to date, with unmatched robustness and potential for flexible substrate integration and ultra-low-power operation. This thesis shows a path toward future low-power IMU-based applications including wearable inertial sensors, health informatics, and personal inertial navigation.

Authors and Affiliations

  • School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, USA

    Haoran Wen

About the author

Haoran Wen is a research engineer in the School of Electrical and Computer Engineering at Georgia Tech. He received his PhD from Georgia Tech in 2018.

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