Automated Nanohandling by Microrobots

1. Front Matter

   Pages i-xvi

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2. Trends in Nanohandling

   • Sergej Fatikow

   Pages 1-22

3. Robot-based Automated Nanohandling

   • Thomas Wich, Helge Hülsen

   Pages 23-56

4. Learning Controller for Microrobots

   • Helge Hülsen

   Pages 57-101

5. Real-time Object Tracking Inside an SEM

   • Torsten Sievers

   Pages 103-128

6. 3D Imaging System for SEM

   • Marco Jähnisch

   Pages 129-165

7. Force Feedback for Nanohandling

   • Stephan Fahlbusch

   Pages 167-202

8. Characterization and Handling of Carbon Nanotubes

   • Volkmar Eichhorn, Christian Stolle

   Pages 203-235

9. Characterization and Handling of Biological Cells

   • Saskia Hagemann

   Pages 237-266

10. Material Nanotesting

    • Iulian Mircea, Albert Sill

    Pages 267-294

11. Nanostructuring and Nanobonding by EBiD

    • Thomas Wich

    Pages 295-340

12. Back Matter

    Pages 341-346

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“What I want to talk about is the problem of manipulating and controlling things on a small scale” stated Richard P. Feynman at the beginning of his visionary talk “There´s Plenty of Room at the Bottom”, given on December 29th 1959 at the annual meeting of the American Physical Society at the California Institute of Technology. Today, almost half a century after this first insight into unlimited opportunities on the nanoscale level, we still want – and have to – talk about the same issue. The problem identified by Feynmann turned out to be a very difficult one due to a lack of understanding of the underlying phenomena in the nanoworld and a lack of suitable nanohandling methods. This book addresses the second issue and tries to contribute to the tremendous effort of the research community in seeking proper solutions in this field. Automated robot-based nanomanipulation is one of the key challenges of microsystem technology and nanotechnolgy, which has recently been addressed by a rising number of R&D groups and companies all over the world. Controlled, reproducible assembly processes on the nanoscale will enable high-throughput manufacturing of revolutionary products and open up new application fields. The ultimate goal of these research activities is the development of automated nanomanipulation processes to build a bridge between existing precise handling strategies for micro- and nanoscale objects and aspired high-throughput fabrication of micro- and nanosystems.

• automatic control
• computer
• computer science
• control
• control system
• design
• development
• electron microscope
• feedback
• nanotechnology
• physics
• robot
• robotics
• sensor
• software

• Department of Computing Science, University of Oldenburg, Oldenburg, Germany

  Sergej Fatikow

Prof. Dr. Sergej Fatikow is a full professor and Head of the Institute for Microrobotics and Control Engineering at the University of Oldenburg, Germany. His research interests include different aspects of micro- and nanorobotics, microactuators and microsensors, robot-based nanohandling automation, and neuro-fuzzy robot control.

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