Authors:
- Covers microsystem fabrication, MEMS device design, circuit design, circuit micro-architecture and CAD
- Describes work previously done in the field and also lays the groundwork and criteria for future energy-efficient device and system design
- Maximizes reader insights into the design and modeling of micro-relay, micro-relay reliability, integrated circuit design with micro-relays, and more
Part of the book series: Microsystems and Nanosystems (MICRONANO)
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Table of contents (7 chapters)
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Front Matter
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Back Matter
About this book
Authors and Affiliations
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Intel Corporation, Hillsboro, USA
Hei Kam
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Lion Semiconductor, Inc., Berkeley, USA
Fred Chen
About the authors
Fred Chen currently works at Lion Semiconductor, Inc. Hei Kam currently works at Intel Corporation and was formerly a graduate student at UC Berkeley.  Â
Bibliographic Information
Book Title: Micro-Relay Technology for Energy-Efficient Integrated Circuits
Authors: Hei Kam, Fred Chen
Series Title: Microsystems and Nanosystems
DOI: https://doi.org/10.1007/978-1-4939-2128-7
Publisher: Springer New York, NY
eBook Packages: Engineering, Engineering (R0)
Copyright Information: Springer Science+Business Media New York 2015
Hardcover ISBN: 978-1-4939-2127-0Published: 20 October 2014
Softcover ISBN: 978-1-4939-5417-9Published: 23 August 2016
eBook ISBN: 978-1-4939-2128-7Published: 16 October 2014
Series ISSN: 2198-0063
Series E-ISSN: 2198-0071
Edition Number: 1
Number of Pages: X, 183
Number of Illustrations: 111 b/w illustrations, 56 illustrations in colour
Topics: Nanotechnology and Microengineering, Circuits and Systems, Energy Efficiency