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Table of contents (7 chapters)
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Front Matter
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Back Matter
About this book
Authors and Affiliations
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Philips Components, Eindhoven, The Netherlands
A. J. Roosmalen
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Philips Research Laboratories, Eindhoven, The Netherlands
J. A. G. Baggerman, S. J. H. Brader
Bibliographic Information
Book Title: Dry Etching for VLSI
Authors: A. J. Roosmalen, J. A. G. Baggerman, S. J. H. Brader
Series Title: Updates in Applied Physics and Electrical Technology
DOI: https://doi.org/10.1007/978-1-4899-2566-4
Publisher: Springer New York, NY
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eBook Packages: Springer Book Archive
Copyright Information: Springer Science+Business Media New York 1991
Hardcover ISBN: 978-0-306-43835-6Published: 31 March 1991
Softcover ISBN: 978-1-4899-2568-8Published: 29 May 2013
eBook ISBN: 978-1-4899-2566-4Published: 29 June 2013
Edition Number: 1
Number of Pages: XVII, 237
Topics: Nuclear Physics, Heavy Ions, Hadrons, Classical and Continuum Physics, Electrical Engineering, Optical and Electronic Materials