Skip to main content
SpringerLink
Log in

Mechanisms of Reactions of Organometallic Compounds with Surfaces

  • Book
  • © 1989

Overview

Editors:
  1. D. J. Cole-Hamilton

    1. University of St. Andrews, St. Andrews, Fife, Scotland, UK

    View editor publications

    You can also search for this editor in PubMed   Google Scholar

  2. J. O. Williams

    1. University of Manchester Institute of Science and Technology (UMIST), Manchester, UK

    View editor publications

    You can also search for this editor in PubMed   Google Scholar

Part of the book series: NATO Science Series B: (NSSB, volume 198)

This is a preview of subscription content, log in via an institution to check access.

Access this book

Log in via an institution
eBook USD 129.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book USD 169.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book USD 169.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Other ways to access

Licence this eBook for your library

Institutional subscriptions

Table of contents (31 chapters)

  1. Front Matter

    Pages i-xiii
    Download chapter PDF

  2. Metallisation and Related Reactions

    1. Front Matter

      Pages 1-1
      Download chapter PDF

    2. New Directions in LCVD Metallisation

      • P. John
      Pages 3-4

    3. Photo-Induced Organometallic Processes in Semiconductor Surface Technology

      • J Haigh, K Durose
      Pages 5-13

    4. UV Excimer Laser Induced Photochemistry of Gaseous Organometallics for Surface Modification

      • M. Stuke, Y. Zhang
      Pages 15-22

    5. Laser-Induced Photodissociation of A12(CH3)6: Gas-Phase and Adsorbed Layer Dissociation Mechanisms for A1 Film Growth

      • D. Lubben, T. Motooka, J. F. Wendelken, J. E. Greene
      Pages 23-32

    6. Photonucleation and Photodeposition of A1 on Si from Flowing

      • J. E. Bourree, J. Flicstein
      Pages 33-45

    7. An in Situ Study of Chemical Vapor Deposition of Triisobutylaluminum on SI (100)

      • David A. Mantell
      Pages 47-53

    8. An In-Situ Study of the UV Photochemistry of Adsorbed TiCl4, by FTIR Spectroscopy

      • Parul Vora Purohit, Mordechai Rothschild, Daniel J. Ehrlich
      Pages 55-62

    9. Model Studies of LCVD of Transition Metals on Silicon: Surface Processes

      • C. M. Friend, J. R. Swanson, F. A. Flitsch
      Pages 63-67

    10. Excimer Laser Assisted Deposition of Cr and B Films

      • M. Georgopoulos, G. S. Fu, E. Hontzopoulos, C. Fotakis
      Pages 69-73

    11. Reactions of Group V Metal Hydrides with Surfaces

      • R. A. Masut, M. A. Sacilotti, A. P. Roth, D. F. Williams
      Pages 75-84

  3. Techniques for Studying Silicon Deposition

    1. Front Matter

      Pages 85-85
      Download chapter PDF

    2. Some Considerations of the Kinetics and Thermodynamics of CVD Processes

      • Michael L. Hitchman, Waqar Ahmed, Sarkis Shamlian, Michael Trainor
      Pages 87-96

    3. The Chemistry of Silicon Deposition from Hydride Decomposition

      • B. A. Scott, S. M. Gates, C. M. Greenlief, R. D. Estes
      Pages 97-102

    4. The Spectroscopy of Crystal Growth Surface Intermediates on Silicon

      • M. A. Chesters, A. B. Horn, E. J. C. Kellar, S. F. Parker, R. Raval
      Pages 103-109

  4. Growth of Semi-Conductors by Gas Phase Movpe

    1. Front Matter

      Pages 111-111
      Download chapter PDF

    2. Growth of Semi-Conductors by Thermal MOVPE

      • J. O. Williams, M. D. Scott
      Pages 113-115

    3. Reactions Mechanisms in OMVPE Growth of GaAs Determined Using Labelling Experiments

      • G. B. Stringfellow
      Pages 117-128

    4. Chemical Boundary Layers in MOCVD: The Return of the Stagnant Layer

      • M. H. J. M. de Croon, L. J. Giling
      Pages 129-130
Back to top

Keywords

About this book

A NATO Advanced Research Workshop on the "Mechanisms of Reactions of Organometallic Compounds with Surfaces" was held in St. Andrews, Scotland in June 1988. Many of the leading international researchers in this area were present at the workshop and all made oral presentations of their results. In addition, significant amounts of time were set aside for Round Table discussions, in which smaller groups considered the current status of mechanistic knowledge, identified areas of dispute or disagreement, and proposed experiments that need to be carried out to resolve such disputes so as to advance our understanding of this important research area. All the papers presented at the workshop are collected in this volume, together with summaries of the conclusions reached at the Round Table discussions. The workshop could not have taken place without financial support from NATO, and donations were also received from Associated Octel, Ltd., STC Ltd., and Epichem Ltd., for which the organisers are very grateful. The organisation of the meeting was greatly assisted by Mrs G. MacArthur and Mr L.R. Dunley of the Chemistry Department, St. Andrews University.

Editors and Affiliations

  • University of St. Andrews, St. Andrews, Fife, Scotland, UK

    D. J. Cole-Hamilton

  • University of Manchester Institute of Science and Technology (UMIST), Manchester, UK

    J. O. Williams

Bibliographic Information

  • Book Title: Mechanisms of Reactions of Organometallic Compounds with Surfaces

  • Editors: D. J. Cole-Hamilton, J. O. Williams

  • Series Title: NATO Science Series B:

  • DOI: https://doi.org/10.1007/978-1-4899-2522-0

  • Publisher: Springer New York, NY

  • eBook Packages: Springer Book Archive

  • Copyright Information: Springer Science+Business Media New York 1989

  • Hardcover ISBN: 978-0-306-43205-7Published: 01 August 1989

  • Softcover ISBN: 978-1-4899-2524-4Published: 22 June 2013

  • eBook ISBN: 978-1-4899-2522-0Published: 11 November 2013

  • Series ISSN: 0258-1221

  • Edition Number: 1

  • Number of Pages: XIV, 300

  • Topics: Physics, general

Publish with us

Policies and ethics

Back to top

Search

Navigation