Skip to main content
SpringerLink
Log in

Particles on Surfaces 3

Detection, Adhesion, and Removal

  • Book
  • © 1991

Overview

Editors:
  1. K. L. Mittal

    1. IBM US Technical Education, Thornwood, USA

    View editor publications

    You can also search for this editor in PubMed   Google Scholar

This is a preview of subscription content, log in via an institution to check access.

Access this book

Log in via an institution
eBook USD 129.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book USD 169.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book USD 169.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Other ways to access

Licence this eBook for your library

Institutional subscriptions

Table of contents (24 chapters)

  1. Front Matter

    Pages i-viii
    Download chapter PDF

  2. Particle-Surface Interactions, Adhesion and General Papers

    1. Front Matter

      Pages 1-1
      Download chapter PDF

    2. Relevance of Surface Energetics to Departiculation of Disk Drive Substrates

      • R. Nagarajan
      Pages 3-15

    3. Particle Adhesion to Surface Under Turbulent Flow Conditions

      • N. Vatistas
      Pages 17-27

    4. Modelling Particle Accumulation on a Filter Surface

      • P. Schmitz, D. Houi
      Pages 29-34

    5. Particles in Ulsi Grade Chemicals and Their Adhesion to Silicon Surfaces

      • Mitsushi Itano, Ichiro Kawanabe, Frederick W. Kern Jr., Masayuki Miyashita, Reed W. Rosenberg, Tadahiro Ohmi et al.
      Pages 35-49

    6. Evaluation of Polymeric Materials Used in the Manufacture of Disk Handling Cassettes

      • G. J. Stone, A. Fukushima
      Pages 51-66

    7. The Release of Particles During Spaceflight

      • J. B. Barengoltz
      Pages 67-75

  3. Particle Detection, Identification, Analysis and Characterization

    1. Front Matter

      Pages 77-77
      Download chapter PDF

    2. Statistical Aspects of Surface Particle Counting

      • B. Leslie, J. Pecen, K. Gross, A. Neukermans
      Pages 79-90

    3. Light Scattering by Submicron Spherical Particles on Semiconductor Surfaces

      • E. J. Bawolek, E. D. Hirleman
      Pages 91-105

    4. BRDF Measurements and Mie Scattering Analysis of Spherical Particles on Optical Surfaces

      • Robert J. Champetier, Michael Sobelman, Julio R. Blanco
      Pages 107-121

    5. Identification of Surface Contaminants Using Infrared Micro-Profiling

      • D. S. Blair, K. J. Ward
      Pages 123-130

    6. Analysis of Particles on Surfaces by Total Reflection X-Ray Fluorescence Spectrometry

      • H. Schwenke, J. Knoth, U. Weisbrod
      Pages 131-141

    7. Characterization of Surface Metal Particulate Contamination Using the Polysilicon Chemical Vapor Deposition Process

      • William A. Syverson, Paul J. Schubring
      Pages 143-152

    8. Detection and Subsequent Reduction of Surface Particle Induced Defects on Silicon Wafers

      • Betty Miller, Christopher W. Teutsch, Cynthia Fournier
      Pages 153-171

    9. Isolation and Characterization of Particle Induced Defects from the Lithography Process Using an Electrical Defect Monitor

      • Christopher W. Teutsch, Betty Miller, Cynthia Fournier
      Pages 173-190
Back to top

Keywords

About this book

This volume chronicles the proceedings of the Third Symposium on Particles on Surfaces : Detection, Adhesion and Removal held as a part of the 21st Annual Meeting of the Fine Particle Society in San Diego , California, August 21 - 25 , 1990 . The first two symposia i n t h i s series were held in 1986 and 1988 , respectively, and have been properly l documented ,2. Li ke its antecedent s the Third symposium was very well received, and the continuing success of these symposia reinforced our earlier belief that regular symposia on the topic of particles on surfaces were very much needed. Concomitantly, the fourth symposium in this series is planned in Las Vegas , July 13-17 , 199 2 . l As pointed out in the Preface to the earlier two volumes ,2, the topic of particles on surfaces is of tremendous interest and concern in a wide spectrum of technological areas . The objectives of the Third symposium were es s ent i a l ly the same as those of the earlier two and our intent her e was to provide an update on the research and development activities in the world of particles on surfaces . Apropos , there has been a deliberate attempt every time to s eek out new people to present their research results and we have been very succes s f ul in this mission.

Editors and Affiliations

  • IBM US Technical Education, Thornwood, USA

    K. L. Mittal

Bibliographic Information

Publish with us

Policies and ethics

Back to top

Search

Navigation