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Microanalysis of Solids

  • Book
  • © 1994

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Editors:
  1. B. G. Yacobi

    1. EMTECH, Toronto, Canada

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  2. D. B. Holt

    1. Department of Materials, Imperial College, London, England

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    You can also search for this editor in PubMed   Google Scholar

  3. L. L. Kazmerski

    1. National Renewable Energy Laboratory, Golden, USA

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Table of contents (14 chapters)

  1. Front Matter

    Pages i-xiii
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  2. Introduction

    1. Front Matter

      Pages 1-1
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    2. An Introduction to Microanalysis of Solids

      • B. G. Yacobi, D. B. Holt
      Pages 3-22

  3. Electron Beam Techniques

    1. Front Matter

      Pages 23-23
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    2. Scanning Electron Microscopy

      • B. G. Yacobi, D. B. Holt
      Pages 25-63

    3. Transmission Electron Microscopy

      • A. J. Garratt-Reed
      Pages 65-98

    4. Auger Electron Spectroscopy

      • L. L. Kazmerski
      Pages 99-146

  4. Ion Beam Techniques

    1. Front Matter

      Pages 147-147
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    2. Secondary Ion Mass Spectrometry

      • S. E. Asher
      Pages 149-177

    3. Applications of Megaelectron-Volt Ion Beams in Materials Analysis

      • P. Revesz, J. Li
      Pages 179-215

  5. Photon Beam Techniques

    1. Front Matter

      Pages 217-217
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    2. Confocal Microscopy

      • T. Wilson
      Pages 219-232

    3. X-ray Microscopy

      • A. G. Michette, A. W. Potts
      Pages 233-246

    4. X-ray Photoemission Spectroscopy

      • A. J. Nelson
      Pages 247-267

    5. Laser Ionization Mass Spectrometry

      • R. W. Odom, F. Radicati di Brozolo
      Pages 269-284

    6. Microellipsometry

      • R. F. Cohn
      Pages 285-324

  6. Acoustic Wave Excitation

    1. Front Matter

      Pages 325-325
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    2. Scanning Acoustic Microscopy

      • P. Mutti, G. A. D. Briggs
      Pages 327-355

  7. Tunneling of Electrons and Scanning Probe Microscopies

    1. Front Matter

      Pages 357-357
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    2. Field Emission, Field Ion Microscopy, and the Atom Probe

      • J. J. Hren, J. Liu
      Pages 359-387
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Keywords

About this book

The main objective of this book is to systematically describe the basic principles of the most widely used techniques for the analysis of physical, structural, and compositional properties of solids with a spatial resolution of approxi­ mately 1 ~m or less. Many books and reviews on a wide variety of microanalysis techniques have appeared in recent years, and the purpose of this book is not to replace them. Rather, the motivation for combining the descriptions of various mi­ croanalysis techniques in one comprehensive volume is the need for a reference source to help identify microanalysis techniques, and their capabilities, for obtaining particular information on solid-state materials. In principle, there are several possible ways to group the various micro­ analysis techniques. They can be distinguished by the means of excitation, or the emitted species, or whether they are surface or bulk-sensitive techniques, or on the basis of the information obtained. We have chosen to group them according to the means of excitation. Thus, the major parts of the book are: Electron Beam Techniques, Ion Beam Techniques, Photon Beam Techniques, Acoustic Wave Excitation, and Tunneling of Electrons and Scanning Probe Microscopies. We hope that this book will be useful to students (final year undergrad­ uates and graduates) and researchers, such as physicists, material scientists, electrical engineers, and chemists, working in a wide variety of fields in solid­ state sciences.

Editors and Affiliations

  • EMTECH, Toronto, Canada

    B. G. Yacobi

  • Department of Materials, Imperial College, London, England

    D. B. Holt

  • National Renewable Energy Laboratory, Golden, USA

    L. L. Kazmerski

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