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Particles in Gases and Liquids 3

Detection, Characterization, and Control

  • Book
  • © 1993

Overview

Editors:
  1. K. L. Mittal

    1. Skill Dynamics, an IBM Company, Thornwood, USA

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Table of contents (18 chapters)

  1. Front Matter

    Pages i-viii
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  2. Overview of Digital Simulation Procedures for Aerosols Transport in Turbulent Flows

    • Goodarz Ahmadi
    Pages 1-21

  3. Deposition of Submicron Particles on Surfaces, Part I: Electrostatic Effect

    • Salem Abuzeid, Ahmed Busnaina
    Pages 23-34

  4. Deposition of Submicron Particles on Surfaces, Part II: Turbulence Effect

    • Salem Abuzeid, Ahmed Busnaina
    Pages 35-50

  5. The Influence of Solution Properties on the Deposition of Particles from Liquid Media onto Silicon Wafer Surfaces

    • Deborah J. Riley, Ruben G. Carbonell
    Pages 51-75

  6. Thermophoretically Enhanced Deposition of Sub-Micrometer Particles from a Hot Turbulent Gas

    • P. E. Mort, I. Owen, J. W. Cleaver
    Pages 77-85

  7. Statistics of Continuous Particulate Measurement in Process Gas Streams

    • M. L. Malczewski
    Pages 87-103

  8. Testing Philosophy and Methodology for UHP Gas Handling Components

    • Hwa-Chi Wang, Yao-En Li
    Pages 105-117

  9. A Two-Stage Virtual Impactor for Continuous Concentration of Particles in an Aerosol

    • M. P. Sinha
    Pages 119-129

  10. Evaluation of the API Aerosizer Mach 2 Particle Sizer

    • E. B. Barr, Y. S. Cheng
    Pages 131-139

  11. A Triboelectrically Charged Granular Filter with High Filtration Efficiency

    • M. K. Mazumder, K. B. Tennal, S. Gao
    Pages 141-149

  12. Reduction of Aerosolized Lubricant Contamination in the Airstream of Disk Drives by Proper Ball Bearing Seal Designs

    • Walter Prater, Miguel Dominguez, Romain Giger, Garvin Stone
    Pages 151-169

  13. Design of Cleanroom Airflows for Particle Control Using CFD Analysis: Case Studies

    • Ken Goldstein, John Divelbiss
    Pages 171-187

  14. Cosmetics as a Potential Source of Particulate Contamination in the Clean Room

    • L. Ricks Hauenstein
    Pages 189-201

  15. Factors Affecting the Number of Airborne Particles Released from Clean Room Operators

    • Carole Baczkowski
    Pages 203-212

  16. Scientific and Technological Issues Pertaining to Particle Contamination in Plasma Processing

    • Gary S. Selwyn
    Pages 213-222

  17. Enumeration, Characterization, and Monitoring of Paricles in Pharmaceutical Manufacturing

    • T. A. Barber
    Pages 223-256

  18. Use of a Modified Particle Recognition and Characterization (PRC) Technique to Monitor Cleaning Fluids in HDA Fabrication

    • Evelyn Ackerman, Richard Adams
    Pages 257-268

  19. Ultraclean Marangoni Drying

    • J. Marra
    Pages 269-282

  20. Back Matter

    Pages 283-292
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Keywords

About this book

This book documents the proceedings of the Third Symposium on Particles in Gases and Liquids: Detection, Characterization and Control held as a part of the 22nd Annual Meeting of the Fine Particle Society in San Jose, California, July 29-August 2, 1991. This series of symposia was initiated in 1987 in light of the growing importance to eliminate particles from process gases and liquids. As pointed out in the Preface to antecedent volumes in this series that particles in process gases and liquids could cause significant yield losses in precision manufacturing and concomitantly there has been heightened interest in understanding the behavior of particles in gases and liquids and devising ways to eliminate, or at least reduce substantially, these particles. The concern about particles in gases and liquids has been there for qui.te some time in the microelectronics arena, but there are other areas also where particles are of significant concern, e.g. in operation theatres in hospitals, food and beverage industry, and pharmaceutical manufacturing. This symposium basically had the same objectives as its predecessors, but to provide an update on the R&D activity taking place in the arena of particle detection, characterization and control. The printed program comprised a total of 28 papers dealing with variegated aspects of particles in gases and liquids. There were brisk and lively discussions and the attendees offered many positive comments, which goes to show that it was a well-received and needed symposium.

Editors and Affiliations

  • Skill Dynamics, an IBM Company, Thornwood, USA

    K. L. Mittal

Bibliographic Information

  • Book Title: Particles in Gases and Liquids 3

  • Book Subtitle: Detection, Characterization, and Control

  • Editors: K. L. Mittal

  • DOI: https://doi.org/10.1007/978-1-4899-1187-2

  • Publisher: Springer New York, NY

  • eBook Packages: Springer Book Archive

  • Copyright Information: Springer Science+Business Media New York 1993

  • Hardcover ISBN: 978-0-306-44485-2Published: 31 July 1993

  • Softcover ISBN: 978-1-4899-1189-6Published: 12 June 2013

  • eBook ISBN: 978-1-4899-1187-2Published: 11 November 2013

  • Edition Number: 1

  • Number of Pages: VIII, 292

  • Topics: Physical Chemistry

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