Skip to main content
  • Book
  • © 1993

Microwave Discharges

Fundamentals and Applications

Part of the book series: NATO Science Series B: (NSSB, volume 302)

Buy it now

Buying options

eBook USD 169.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book USD 219.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book USD 219.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Other ways to access

This is a preview of subscription content, log in via an institution to check for access.

Table of contents (35 chapters)

  1. Front Matter

    Pages i-ix
  2. Microwave Plasma Sources

    1. Surface-Wave Plasma Sources

      • Zenon Zakrzewski, Michel Moisan, Gaston Sauvé
      Pages 117-140
    2. ECR Plasma Sources

      • Rolf Wilhelm
      Pages 161-179
    3. Large Area Planar Microwave Plasmas

      • Andreas Ohl
      Pages 205-214
    4. Fabry-Perot-Type Microwave Resonator

      • Günter Böhm
      Pages 215-223
  3. Diagnostics

    1. Diagnostics of Microwave Discharges

      • H. Schlüter
      Pages 225-245
    2. Thermal Discharges: Experiments and Diagnostics

      • D. C. Schram, D. A. Benoy, J. J. Beulens, A. J. M. Buuron, F. H. A. G. Fey, M. J. de Graaf et al.
      Pages 247-267
    3. Optical Diagnostics for High Electron Density Plasmas

      • M. C. M. van de Sanden, R. F. G. Meulenbroeks, J. J. Beulens, A. J. M. Buuron, M. J. de Graaf, G. J. Meeusen et al.
      Pages 279-290
    4. Use of Emissive Probes in HF Plasmas

      • F. M. Dias
      Pages 291-302

Editors and Affiliations

  • Instituto Superior Técnico, Centro de Electrodinâmica da Universidade Técnica de Lisboa, Lisbon, Portugal

    Carlos M. Ferreira

  • Groupe de physique des plasmas, Université de Montréal, Montréal, Canada

    Michel Moisan

Bibliographic Information

Buy it now

Buying options

eBook USD 169.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book USD 219.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book USD 219.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Other ways to access