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Table of contents (14 chapters)
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Front Matter
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Back Matter
About this book
Editors and Affiliations
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The National University of Singapore, Singapore
Francis E. H. Tay
Bibliographic Information
Book Title: Materials & Process Integration for MEMS
Editors: Francis E. H. Tay
Series Title: Microsystems
DOI: https://doi.org/10.1007/978-1-4757-5791-0
Publisher: Springer New York, NY
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eBook Packages: Springer Book Archive
Copyright Information: Springer Science+Business Media New York 2002
Hardcover ISBN: 978-1-4020-7175-1Published: 31 August 2002
Softcover ISBN: 978-1-4419-5303-2Published: 03 December 2010
eBook ISBN: 978-1-4757-5791-0Published: 29 June 2013
Series ISSN: 1389-2134
Edition Number: 1
Number of Pages: XIX, 299
Topics: Characterization and Evaluation of Materials, Classical Mechanics