Chemical Vapor Deposition Polymerization

1. Front Matter

   Pages i-xvii

   PDF

2. Introduction

   • Jeffrey B. Fortin, Toh-Ming Lu

   Pages 1-7

3. Deposition Equipment

   • Jeffrey B. Fortin, Toh-Ming Lu

   Pages 9-22

4. Step-by-Step Guide to Depositing Parylene

   • Jeffrey B. Fortin, Toh-Ming Lu

   Pages 23-26

5. Parylene-N Precursor Chemistry

   • Jeffrey B. Fortin, Toh-Ming Lu

   Pages 27-40

6. Deposition Kinetics for Polymerization via the Gorham Route

   • Jeffrey B. Fortin, Toh-Ming Lu

   Pages 41-55

7. Film Properties

   • Jeffrey B. Fortin, Toh-Ming Lu

   Pages 57-82

8. Other CVD Polymers

   • Jeffrey B. Fortin, Toh-Ming Lu

   Pages 83-89

9. Back Matter

   Pages 91-102

   PDF

Chemical Vapor Deposition Polymerization - The Growth and Properties of Parylene Thin Films is intended to be valuable to both users and researchers of parylene thin films. It should be particularly useful for those setting up and characterizing their first research deposition system. It provides a good picture of the deposition process and equipment, as well as information on system-to-system variations that is important to consider when designing a deposition system or making modifications to an existing one. Also included are methods to characterizae a deposition system's pumping properties as well as monitor the deposition process via mass spectrometry. There are many references that will lead the reader to further information on the topic being discussed.
This text should serve as a useful reference source and handbook for scientists and engineers interested in depositing high quality parylene thin films.

• Parylene
• polymer
• polymerization
• polymers
• thin films

• Department of Engineering Science, Rensselaer Polytechnic Institute, Troy, USA

  Jeffrey B. Fortin

• GE Global Research Center, Niskayuna, USA

  Jeffrey B. Fortin

• Department of Physics, Rensselaer Polytechnic Institute, Troy, USA

  Toh-Ming Lu

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