Authors:
Buy it now
Buying options
Tax calculation will be finalised at checkout
Other ways to access
This is a preview of subscription content, log in via an institution to check for access.
Table of contents (16 chapters)
-
Front Matter
-
Introduction
-
Fabrication
-
Front Matter
-
-
Design
-
Front Matter
-
-
Processes
-
Front Matter
-
About this book
This book will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining.
Authors and Affiliations
-
Engineering Science, Simon Fraser University, Canada
Robert W. Johnstone, M. Parameswaran
Bibliographic Information
Book Title: An Introduction to Surface-Micromachining
Authors: Robert W. Johnstone, M. Parameswaran
DOI: https://doi.org/10.1007/978-1-4020-8021-0
Publisher: Springer New York, NY
-
eBook Packages: Springer Book Archive
Copyright Information: Springer Science+Business Media New York 2004
Hardcover ISBN: 978-1-4020-8020-3Published: 03 June 2004
Softcover ISBN: 978-1-4757-1077-9Published: 12 December 2012
eBook ISBN: 978-1-4020-8021-0Published: 31 May 2004
Edition Number: 1
Number of Pages: XIII, 189
Topics: Circuits and Systems, Mechanical Engineering, Electrical Engineering