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Table of contents(15 chapters)
Keywords
About this book
Editors and Affiliations
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IBM Research Laboratory, San Jose, USA
Joachim Bargon
Bibliographic Information
Book Title: Methods and Materials in Microelectronic Technology
Editors: Joachim Bargon
Series Title: The IBM Research Symposia Series
DOI: https://doi.org/10.1007/978-1-4684-4847-4
Publisher: Springer New York, NY
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eBook Packages: Springer Book Archive
Copyright Information: Springer Science+Business Media New York 1984
Softcover ISBN: 978-1-4684-4849-8Published: 24 December 2012
eBook ISBN: 978-1-4684-4847-4Published: 09 March 2013
Edition Number: 1
Number of Pages: VIII, 367