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Table of contents (93 chapters)
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Front Matter
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III–V Compound Semiconductors I
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Front Matter
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III–V Compound Semiconductors II
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Front Matter
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About this book
Editors and Affiliations
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Faculty of Engineering Science, Osaka University, Toyonaka, Osaka, Japan
Susumu Namba
Bibliographic Information
Book Title: Ion Implantation in Semiconductors
Book Subtitle: Science and Technology
Editors: Susumu Namba
DOI: https://doi.org/10.1007/978-1-4684-2151-4
Publisher: Springer New York, NY
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eBook Packages: Springer Book Archive
Copyright Information: Springer Science+Business Media New York 1975
Softcover ISBN: 978-1-4684-2153-8Published: 29 April 2013
eBook ISBN: 978-1-4684-2151-4Published: 06 December 2012
Edition Number: 1
Number of Pages: XV, 742