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Table of contents (7 chapters)
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Front Matter
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Back Matter
About this book
Microcantilevers for Atomic Force Microscope Data Storage describes how silicon micromachined cantilevers can be used for high-density topographic data storage on a simple substrate such as polycarbonate. The cantilevers can be made to incorporate resistive heaters (for thermal writing) or piezoresistive deflection sensors (for data readback).
The primary audience for Microcantilevers for Atomic Force Microscope Data Storage is industrial and academic workers in the microelectromechanical systems (MEMS) area. It will also be of interest to researchers in the data storage industry who are investigating future storage technologies.
Authors and Affiliations
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Stanford University, USA
Benjamin W. Chui
Bibliographic Information
Book Title: Microcantilevers for Atomic Force Microscope Data Storage
Authors: Benjamin W. Chui
Series Title: Microsystems
DOI: https://doi.org/10.1007/978-1-4615-4983-3
Publisher: Springer New York, NY
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eBook Packages: Springer Book Archive
Copyright Information: Springer Science+Business Media New York 1999
Hardcover ISBN: 978-0-7923-8358-1Published: 31 October 1998
Softcover ISBN: 978-1-4613-7262-2Published: 11 October 2012
eBook ISBN: 978-1-4615-4983-3Published: 06 December 2012
Series ISSN: 1389-2134
Edition Number: 1
Number of Pages: XXV, 148
Topics: Circuits and Systems, Electrical Engineering, Computer Science, general