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Table of contents (7 chapters)
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About this book
The field of FIBs has advanced rapidly since the application of the first field emission ion sources in the early 1970s. The development of the liquid metal ion source (LMIS) in the late 1960s and early 1970s and its application for FIBs in the late 1970s have resulted in a powerful tool for research and for industry. There have been hundreds of papers written on many aspects of LMIS and FIBs, and a useful and informative book on these subjects was published in 1991 by Phil Prewett and Grame Mair. Because there have been so many new applications and uses found for FIBs in the last ten years we felt that it was time for another book on the subject.
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Bibliographic Information
Book Title: High Resolution Focused Ion Beams: FIB and its Applications
Book Subtitle: The Physics of Liquid Metal Ion Sources and Ion Optics and Their Application to Focused Ion Beam Technology
Authors: Jon Orloff, Mark Utlaut, Lynwood Swanson
DOI: https://doi.org/10.1007/978-1-4615-0765-9
Publisher: Springer New York, NY
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eBook Packages: Springer Book Archive
Copyright Information: Springer Science+Business Media New York 2003
Hardcover ISBN: 978-0-306-47350-0Published: 31 October 2002
Softcover ISBN: 978-1-4613-5229-7Published: 20 September 2012
eBook ISBN: 978-1-4615-0765-9Published: 06 December 2012
Edition Number: 1
Number of Pages: XI, 304
Topics: Characterization and Evaluation of Materials, Physics, general, Optical and Electronic Materials, Optics, Lasers, Photonics, Optical Devices