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Metallization of Polymers 2

  • Book
  • © 2002

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Editors:
  1. Edward Sacher

    1. École Polytechnique, Montréal, Canada

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Table of contents (16 chapters)

  1. Front Matter

    Pages i-viii
    Download chapter PDF

  2. New Instrumentation

    1. Surface Analysis Using Confocal Raman Micro-Spectroscopy

      • C. Hyett, D.-Q. Yang, T. H. Ellis, E. Sacher
      Pages 1-9

    2. Ellipsometric Characterization of the Optical Constants of Metals: Thin Film versus Nanoparticle

      • Dan Dalacu, Ludvik Martinu
      Pages 11-22

    3. Ultra Thin Film Analysis using Thermo VG Scientifics Thetaprobe Instrument

      • R. K. Champaneria, J. Wolstenholme
      Pages 23-34

    4. Nanoindentation of Microsprings and Microcantilevers

      • Mary W. Seto, Brian Dick, Michael J. Brett
      Pages 35-42

  3. Low Permittivity Materials

    1. Physical and Interfacial Properties of Low Permittivity Polymers: Silk and Ultra-Low K

      • D. C. Frye, J. J. Waeterloos, M. Simmonds, T. Stokich, J. Im
      Pages 43-51

    2. Mechanical Properties of Cured SiLK Low-K Dielectric Films

      • J. Im, P. H. Townsend, J. Curphy, C. Karas, E. O. Shaffer II
      Pages 53-60

    3. Plasma-Polymerized Fluoropolymer Thin Films for Microelectronic Applications

      • M. S. Silverstein, R. Chen, E. Sacher, L. Sandrin
      Pages 61-71

  4. Polymer Metallization

    1. Fundamental Aspects of Polymer Metallization

      • F. Faupel, V. Zaporojtchenko, T. Strunskus, J. Erichsen, K. Dolgner, A. Thran et al.
      Pages 73-96

    2. The Study of Copper Clusters on Dow Cyclotene and Their Stability

      • D.-Q. Yang, E. Sacher
      Pages 97-105

    3. Adsorption of Noble Metal Atoms on Polymers

      • V. Zaporojtchenko, J. Erichsen, J. Zekonyte, A. Thran, T. Strunskus, F. Faupel
      Pages 107-116

    4. Nucleation and Growth of Vapor-Deposited Metal Films on Self-Assembled Monolayers Studied by Multiple Characterization Probes

      • A. V. Walker, G. L. Fisher, A. E. Hooper, T. Tighe, R. L. Opila, N. Winograd et al.
      Pages 117-126

  5. Barrier Layers

    1. Morphological Investigations of Low-k Polymer/Diffusion Barrier Interfaces for IC Metallization

      • Sujatha Sankaran, Robert E. Geer
      Pages 127-140

    2. Chemistry in the Initial Formation of Nitride Barriers on Low-K Dielectrics

      • Peter Abramowitz, Junjun Liu, Michael Kiene, Paul S. Ho, Jay Im
      Pages 141-151

    3. Capabilities and Limitations of RBS to Characterize Hyper-Thin Silicon Compound Layers on Various Polymeric Substrates

      • G. Dennler, A. Houdayer, P. Raynaud, Y. Ségui, M. R. Wertheimer
      Pages 153-163

  6. Adhesion Enhancement

    1. Surface Modification by Ion Assisted Reaction

      • S. K. Koh, Y. W. Beag, W. K. Bang, S. Han, J. S. Cho, K. H. Kim
      Pages 165-190

    2. Plasma and VUV Pretreatments of Polymer Surfaces for Adhesion Enhancement of Electrolessly Deposited Ni or Cu Films

      • Maurice Romand, Marlène Charbonnier, Yves Goepfert
      Pages 191-205

  7. Back Matter

    Pages 207-208
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Keywords

About this book

As the demands put on the polymer/metal interface, particularly by the microelectronics industry, become more and more severe, the necessity for understanding this interface, its properties and its limitations, becomes more and more essential. This requires a broad knowledge of, and a familiarity with, the latest findings in this rapidly advancing field. At the very least, such familiarity requires an exchange of infonnation, particularly among those intimately involved in this field. Communications among many of us in this area have made one fact quite obvious: the facilities provided by existing organizations, scientific and otherwise, do not offer the forum necessary to accomplish this exchange of infonnation. It was for this reason that Jean-Jacques Pireaux, Steven Kowalczyk and I organized the first Metallization of Polymers, a symposium sponsored by the American Chemical Society, which took place in Montreal, September 25-28, 1989; the Proceedings from that symposium were published as ACS Symposium Series 440, (1990). It is this same per­ ceived lack of a proper forum, and the encouragement of my colleagues, that prompted me to organize this meeting, so as to bring to the attention of the participants new instruments, materials, methods, advances, and, particularly, thoughts in the field of polymer metalliza­ tion. The meeting was designed as a workshop, with time being made available throughout for discussion and for the consideration of new findings.

Editors and Affiliations

  • École Polytechnique, Montréal, Canada

    Edward Sacher

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