Overview
- Authors:
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G. K. Ananthasuresh
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University of Pennsylvania, Philadelphia, USA
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Table of contents (10 chapters)
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Front Matter
Pages i-xiii
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- Anupam Saxena, G. K. Ananthasuresh
Pages 13-42
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- Wenjing Ye, Subrata Mukherjee
Pages 43-77
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- EmÃlio Carlos Nelli Silva
Pages 121-153
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- EmÃlio Carlos Nelli Silva
Pages 155-191
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- Carlos Mastrangelo, Edwin Carlen
Pages 223-265
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- Radha Sarma, G. K. Ananthasuresh
Pages 267-295
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- Tamal Mukherjee, Gary K. Fedder
Pages 297-316
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Back Matter
Pages 317-320
About this book
The field of "microelectromechanical systems," or "MEMS," has gradually evolved from a "discipline" populated by a small group of researchers to an "enabling technology" supporting a variety of products in such diverse areas as mechanical and inertial sensors, optical projection displays, telecommunications equipment, and biology and medicine. Critical to the success of these products is the ability to design them, and this invariably involves detailed modeling of proposed designs. Over the past twenty years, such modeling has become increasingly sophisticated, with full suites of MEMS-oriented computer-aided-design tools now available worldwide. But there is another equally important side to the design process  In my own book, Microsystem figuring out what to build in the first place. Design, I chose to emphasize the modeling aspect of design. The task of figuring out what to build was defined by a vague step called "creative thinking." I used practical product examples to illustrate the many subtle characteristics of successful designs, but I made no attempt to systematize the generation ofdesign proposals or optimized designs. That systemization is called "synthesis," which is the subjectofthis book.
Authors and Affiliations
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University of Pennsylvania, Philadelphia, USA
G. K. Ananthasuresh
