Ion Spectroscopies for Surface Analysis

1. Front Matter

   Pages i-xvii

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2. Overview of Ion Spectroscopies for Surface Compositional Analysis

   • A. W. Czanderna

   Pages 1-44

3. Surface Structure and Reaction Studies by Ion-Solid Collisions

   • Nicholas Winograd, Barbara J. Garrison

   Pages 45-141

4. Particle-Induced Desorption Ionization Techniques for Organic Mass Spectrometry

   • Kenneth L. Busch

   Pages 143-271

5. Laser Resonant and Nonresonant Photoionization of Sputtered Neutrals

   • Christopher H. Becker

   Pages 273-310

6. Rutherford Backscattering and Nuclear Reaction Analysis

   • L. C. Feldman

   Pages 311-361

7. Ion Scattering Spectroscopy

   • E. Taglauer

   Pages 363-416

8. Comparisons of SIMS, SNMS, ISS, RBS, AES, and XPS Methods for Surface Compositional Analysis

   • C. J. Powell, D. M. Hercules, A. W. Czanderna

   Pages 417-437

9. Back Matter

   Pages 439-469

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Determining the elemental composition of surfaces is an essential measurement in characterizing solid surfaces. At present, many ap­ proaches may be applied for measuring the elemental and molecular composition of a surface. Each method has particular strengths and limitations that often are directly connected to the physical processes involved. Typically, atoms and molecules on the surface and in the near surface region may be excited by photons, electrons, ions, or neutrals, and the detected particles are emitted, ejected, or scattered ions or electrons. The purpose of this book is to bring together a discussion of the surface compositional analysis that depends on detecting scattered or sputtered ions, and the methods emphasized are those where instruments are commercially available for carrying out the analysis. For each topic treated, the physical principles, instrumentation, qualitative analysis, artifacts, quantitative analysis, applications, opportunities, and limita­ tions are discussed. The first chapter provides an overview of the role of elemental composition in surface science; compositional depth profiling; stimulation by an electric field, electrons, neutrals, or photons and detection of ions; and then stimulation by ions, and detection of ions, electrons, photons, or neutrals.

• Atom
• Chromat
• Diffusion
• X-ray
• chromatography
• crystal
• electron
• metals
• photoelectron spectroscopy
• polymer
• qualitative analysis
• quantitative analysis
• spectroscopy
• surface science
• thermodynamics

• Solar Energy Research Institute, Golden, USA

  A. W. Czanderna

• University of Pittsburgh, Pittsburgh, USA

  David M. Hercules

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