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Particles in Gases and Liquids 1

Detection, Characterization, and Control

  • Book
  • © 1989

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Editors:
  1. K. L. Mittal

    1. IBM US Technical Education, Thornwood, USA

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Table of contents (19 chapters)

  1. Front Matter

    Pages i-viii
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  2. Monitoring Contaminant Particles in Gases and Liquids: A Review

    • Douglas W. Cooper
    Pages 1-33

  3. Measuring and Identifying Particles in Ultrapure Water

    • Marjorie K. Balazs
    Pages 35-50

  4. Non-Poisson Models of Particle Counting

    • R. A. Van Slooten, M. L. Malczewski
    Pages 51-79

  5. Liquid Particle Counter Comparison

    • C. Willis
    Pages 81-95

  6. Particle Counting of Liquid Systems Using a Scanning Electron Microscope

    • W. A. Zorn
    Pages 97-119

  7. Improved Methodology for Measurement of Particle Concentrations in Semiconductor Process Chemicals

    • Donald C. Grant
    Pages 121-134

  8. Calibration of the Photo-Sedimentometer Lumosed with a Powder of Known Particle Size Distribution

    • M. Hangl, G. Staudinger
    Pages 135-141

  9. Particle Contamination Control and Measurement in Ultra-Pure VLSI Grade Inert Gases

    • R. M. Thorogood, A. Schwarz, W. T. McDermott
    Pages 143-156

  10. Design and Practical Considerations in Using Cascade Impactors to Collect Particle Samples from Process Gases for Identification

    • W. L. Chiang, R. L. Chuan
    Pages 157-165

  11. In-Situ Monitoring of Particulate Contamination in Integrated Circuit Process Equipment

    • Steven D. Cheung
    Pages 167-173

  12. A Real-Time Fallout Monitor for 5–250 Micrometer Particles

    • Peter G. Borden, Jon Munson, Donald W. Bartelson
    Pages 175-184

  13. Measurement and Control of Particle-Bearing Air Currents in a Vertical Laminar Flow Clean Room

    • G. S. Settles, G. G. Via
    Pages 185-194

  14. Particle Deposition Velocity Studies in Silicon Technology

    • D. S. Ensor, A. C. Clayton, T. Yamamoto, R. P. Donovan
    Pages 195-204

  15. Influence of Particle Charge on the Collection Efficiency of Electrified Filter Mats

    • M. K. Mazumder, A. M. Siag
    Pages 205-221

  16. Particle Retention and Downstream Cleanliness of Point-of-Use Filters for Semiconductor Process Gases

    • Mauro A. Accomazzo, Donald C. Grant
    Pages 223-233

  17. A Fluid Dynamic Study of a Microcontaminant Particles Removal Process

    • Ahmed A. Busnaina, M. A. R. Sharif, Glenn Gale, Frederick W. Kern Jr.
    Pages 235-257

  18. Particle Removal from Semiconductor Wafers Using Cleaning Solvents

    • V. B. Menon, L. D. Michaels, R. P. Donovan, V. L. Debler, M. B. Ranade
    Pages 259-271

  19. Particle Contributions of Three Types of Cleanroom Jumpsuits

    • R. C. White, J. R. Weaver
    Pages 273-281

  20. Particulate Generation in Devices Used in Clean Manufacturing

    • H. S. Nagaraj, B. L. Owens, R. J. Miller
    Pages 283-293
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Keywords

About this book

This book documents the proceedings of the Symposium on Particles in Fluids: Detection, Characterization and Control held as a part of the 18th Fine Particle Society meeting in Boston, August 3-7, 1987. This was the Premier symposium on this topic and the response was so good that we have decided to organize it on a biennial basis and the second symposium will be held under the rubric Particles in Gases and Liquids: Detection, Characterization and Control at the 20th Fine Particle Society meeting in Boston, August 22-26, 1989. In the modern manufacture of sophisticated and sensitive microelectronic components and other precision parts, there has been a great deal of concern about yield losses due to micrometer- and submicrometer-sized particles. These particles can originate from a number of sources including fluids, i. e. , gases and liquids used in the manufacturing process. So the detection, characterization and control or removal of these undesirable particles is of cardinal importance and this symposium was conceived and o~ganized with this in mind. The purposes of this symposium were to bring together those actively involved in all aspects of particles in fluids, to provide a forum for discussion of the latest techniques for the detection, characterization and control of particles, and to highlight areas which needed intensified R&D efforts. The printed program contained a total of 46 papers and a variety of topics dealing with various ramifications of particles in fluids were presented.

Editors and Affiliations

  • IBM US Technical Education, Thornwood, USA

    K. L. Mittal

Bibliographic Information

  • Book Title: Particles in Gases and Liquids 1

  • Book Subtitle: Detection, Characterization, and Control

  • Editors: K. L. Mittal

  • DOI: https://doi.org/10.1007/978-1-4613-0793-8

  • Publisher: Springer New York, NY

  • eBook Packages: Springer Book Archive

  • Copyright Information: Plenum Press, New York 1989

  • Hardcover ISBN: 978-0-306-43151-7Due: 30 June 1989

  • Softcover ISBN: 978-1-4612-8085-9Published: 26 September 2011

  • eBook ISBN: 978-1-4613-0793-8Published: 06 December 2012

  • Edition Number: 1

  • Number of Pages: 312

  • Topics: Physical Chemistry

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