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Precision Motion Control

Design and Implementation

  • Book
  • © 2001

Overview

Authors:
  1. Tan Kok Kiong

    1. Department of Electrical Engineering, National University of Singapore, Singapore

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  2. Lee Tong Heng

    1. Department of Electrical Engineering, National University of Singapore, Singapore

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  3. Dou Huifang

    1. Department of Electrical Engineering, National University of Singapore, Singapore

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  4. Huang Sunan

    1. Department of Electrical Engineering, National University of Singapore, Singapore

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  • Higher performance requirements and the increasing need for economic competetiveness are making precision control more and more important
  • The text is co-authored by a leading control engineer from an academic department of high repute

Part of the book series: Advances in Industrial Control (AIC)

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Table of contents (8 chapters)

  1. Front Matter

    Pages i-xviii
    Download chapter PDF

  2. Overview of Nanotechnology

    • Tan Kok Kiong, Lee Tong Heng, Dou Huifang, Huang Sunan
    Pages 1-11

  3. Precision Tracking Motion Control

    • Tan Kok Kiong, Lee Tong Heng, Dou Huifang, Huang Sunan
    Pages 13-74

  4. Automatic Tuning of Control Parameters

    • Tan Kok Kiong, Lee Tong Heng, Dou Huifang, Huang Sunan
    Pages 75-93

  5. Co-Ordinated Motion Control of Gantry Systems

    • Tan Kok Kiong, Lee Tong Heng, Dou Huifang, Huang Sunan
    Pages 95-112

  6. Geometrical Error Compensation

    • Tan Kok Kiong, Lee Tong Heng, Dou Huifang, Huang Sunan
    Pages 113-156

  7. Electronic Interpolation Errors

    • Tan Kok Kiong, Lee Tong Heng, Dou Huifang, Huang Sunan
    Pages 157-171

  8. Vibration Monitoring and Control

    • Tan Kok Kiong, Lee Tong Heng, Dou Huifang, Huang Sunan
    Pages 173-199

  9. Other Engineering Aspects

    • Tan Kok Kiong, Lee Tong Heng, Dou Huifang, Huang Sunan
    Pages 201-212

  10. Back Matter

    Pages 213-232
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Keywords

About this book

Precision manufacturing is a development that has been gathering momentum over the last century and accelerating over the last 25 years in terms of research, development, and application to product innovation. The driving force in this development arises from requirements for much higher performance of products, higher reliability, longer life, lower cost, and miniaturization. This development is widely known as precision engineering and, today, it is generally defined as manufacturing to tolerances which are better than one part in 105. Applications are abound and can be found in various semiconductor processes (e.g., lithography, wafer probing, inspection), Coordinate Measuring Machines (CMMs) and precision metrology systems (e.g., Scanning Probe Microscopy (SPM)), and robot/machine tools to carry out micro-assembly (e.g., MEMS) and delicate short wavelength laser processes.
As an enabling technology for precision engineering, precision instrumentation and measurement, geometrical calibration and compensation, and motion control are directly important issues to be addressed in the overall system design and realization. This book is focused on these aspects of precision engineering. It is a compilation of the major results and publications from a major project which develop a state-of-the-art high-speed, ultra-precision robotic system. A comprehensive and thorough treatment of the subject matter is provided in a manner that is amenable to a broad base of readers, ranging from the academics to the practitioners, by providing detailed experimental verifications of the developed materials.

Authors and Affiliations

  • Department of Electrical Engineering, National University of Singapore, Singapore

    Tan Kok Kiong, Lee Tong Heng, Dou Huifang, Huang Sunan

Bibliographic Information

  • Book Title: Precision Motion Control

  • Book Subtitle: Design and Implementation

  • Authors: Tan Kok Kiong, Lee Tong Heng, Dou Huifang, Huang Sunan

  • Series Title: Advances in Industrial Control

  • DOI: https://doi.org/10.1007/978-1-4471-3691-0

  • Publisher: Springer London

  • eBook Packages: Springer Book Archive

  • Copyright Information: Springer-Verlag London 2001

  • eBook ISBN: 978-1-4471-3691-0Published: 17 April 2013

  • Series ISSN: 1430-9491

  • Series E-ISSN: 2193-1577

  • Edition Number: 1

  • Number of Pages: XVIII, 232

  • Topics: Control and Systems Theory, Mechatronics

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