Buy it now
Buying options
Tax calculation will be finalised at checkout
Other ways to access
This is a preview of subscription content, log in via an institution to check for access.
Table of contents (6 chapters)
-
Front Matter
-
Back Matter
About this book
Authors and Affiliations
-
National Institute of Standards and Technology, Gaithersburg, USA
Loucas G. Christophorou, James K. Olthoff
-
Academy of Athens, Athens, Greece
Loucas G. Christophorou
Bibliographic Information
Book Title: Fundamental Electron Interactions with Plasma Processing Gases
Authors: Loucas G. Christophorou, James K. Olthoff
Series Title: Physics of Atoms and Molecules
DOI: https://doi.org/10.1007/978-1-4419-8971-0
Publisher: Springer New York, NY
-
eBook Packages: Springer Book Archive
Copyright Information: Springer Science+Business Media New York 2004
Hardcover ISBN: 978-0-306-48037-9Published: 31 December 2003
Softcover ISBN: 978-1-4613-4741-5Published: 21 September 2012
eBook ISBN: 978-1-4419-8971-0Published: 06 December 2012
Edition Number: 1
Number of Pages: XV, 781
Topics: Atomic, Molecular, Optical and Plasma Physics, Nuclear Physics, Heavy Ions, Hadrons, Physical Chemistry, Optical and Electronic Materials