Overview
- Demonstrates how to design MEMs for reliability during the product life cycle focusing CAD methodologies and system level architecture
- Provides detailed information on the different types of failure modes, including but not limited to, design failures, manufacturing failures, and material failure, and how to avoid them
- Discusses testing, qualification, processes and procedures for MEMs reliability and the specific tests for enhancing reliability
- Includes supplementary material: sn.pub/extras
Part of the book series: MEMS Reference Shelf (MEMSRS)
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Table of contents (7 chapters)
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Front Matter
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Back Matter
Keywords
About this book
The successful launch of viable MEMs product hinges on MEMS reliability, the reliability and qualification for MEMs based products is not widely understood. Companies that have a deep understanding of MEMs reliability view the information as a competitive advantage and are reluctant to share it.
MEMs Reliability, focuses on the reliability and manufacturability of MEMS at a fundamental level by addressing process development and characterization, material property characterization, failure mechanisms and physics of failure (POF), design strategies for improving yield, design for reliability (DFR), packaging and testing.
Authors and Affiliations
Bibliographic Information
Book Title: MEMS Reliability
Authors: Allyson L. Hartzell, Mark G. da Silva, Herbert R. Shea
Series Title: MEMS Reference Shelf
DOI: https://doi.org/10.1007/978-1-4419-6018-4
Publisher: Springer New York, NY
eBook Packages: Engineering, Engineering (R0)
Copyright Information: Springer Science + Business Media, LLC 2011
Hardcover ISBN: 978-1-4419-6017-7Published: 11 November 2010
Softcover ISBN: 978-1-4614-2736-0Published: 27 December 2012
eBook ISBN: 978-1-4419-6018-4Published: 02 November 2010
Series ISSN: 1936-4407
Series E-ISSN: 1936-4415
Edition Number: 1
Number of Pages: XIII, 291