Micromanufacturing

1. Front Matter

   Pages i-xxxiv

   PDF

2. Introduction

   • Richard E. DeVor, Kornel F. Ehmann

   Pages 1-9

3. Design

   • Martin L. Culpepper, Thomas R. Kurfess

   Pages 11-28

4. Materials

   • David Bourell, Kamlakar Rajurkar

   Pages 29-52

5. Processes

   • Kamlakar Rajurkar, Marc Madou

   Pages 53-87

6. Metrology, Sensors and Control

   • Thomas R. Kurfess, Thom J. Hodgson

   Pages 89-109

7. Non-lithography Applications

   • Marc Madou

   Pages 111-120

8. Business, Education, the Environment, and Other Issues

   • Thom J. Hodgson

   Pages 121-130

9. Back Matter

   Pages 131-362

   PDF

We have come to know that our ability to survive and grow as a nation to a very large degree depends upon our sci- tific progress. Moreover, it is not enough simply to keep abreast of the rest of the world in scientific matters. We 1 must maintain our leadership. President Harry Truman spoke those words in 1950, in the aftermath of World War II and in the midst of the Cold War. Indeed, the scientific and engineering leadership of the United States and its allies in the twentieth century played key roles in the successful outcomes of both World War II and the Cold War, sparing the world the twin horrors of fascism and tota- tarian communism, and fueling the economic prosperity that followed. - day, as the United States and its allies once again find themselves at war, President Truman’s words ring as true as they did a half-century ago. The goal set out in the Truman Administration of maintaining leadership in s- ence has remained the policy of the U. S. government to this day. Dr. John Marburger, the Director of the Office of Science and Technology (OSTP) in the Executive Office of the President, made remarks to that effect during 2 his confirmation hearings in October 2001. The United States needs metrics for measuring its success in meeting this goal of maintaining leadership in science and technology.

• Feder
• Messtechnik
• Sensor
• automation
• communication
• development
• electronics
• integrated circuit
• laser
• machining
• manufacturing
• microelectromechanical system (MEMS)
• nanotechnology
• production
• tables
• Engineering Economics

• Northwestern University, Evanston, USA

  Kornel F. Ehmann

• University of Texas, Austin, USA

  David Bourell

• Massachusetts Institute of Technology, Camridge, USA

  Martin L. Culpepper

• North Carolina State University, Raleigh, USA

  Thom J. Hodgson

• Clemson University, Clemson, USA

  Thomas R. Kurfess

• University of California, Irvine, USA

  Marc Madou

• University of Nebraska, Lincoln, USA

  Kamlakar Rajurkar

• University of Illinois, Urbana, USA

  Richard Devor

Policies and ethics