Authors:
- Provides the reader with the most up to date information and development in the Nanofabrication area
- Readers will learn the advantages and disadvantages of specific nanofabrication techniques depending on the application they are working on
- Focuses on the practical aspects of nanofabrication with examples drawn from both primary research and industrial applications
- Provides detailed information and a description of emerging molecular self-assembly techniques which are increasingly being used as ways of making nanostructures
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Table of contents (8 chapters)
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Front Matter
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Back Matter
About this book
Nanofabrication: Principles, Capabilities and Limits presents a one-stop description at the introductory level on most technologies that have been developed which are capable of making structures below 100nm.
Principles of each technology are introduced and illustrated with minimum mathematics involved. The capabilities of each technology in making sub-100nm structures are described. The limits of preventing a technology from further going down the dimensional scale are analyzed.
Drawing upon years of practical experience and using numerous examples, Zheng Cui covers state-of-the art technologies in nanofabrication including:
- Photon-based lithography
- Charged particle beams lithography
- Nanofabrication using scanning probes
- Nanoscale replication
- Nanoscale pattern transfer
- Indirect nanofabrication
- Nanofabrication by self-assembly
Nanofabrication: Principles, Capabilities and Limits will serve as a practical guide and first-hand reference for researchers and practitioners working in nanostructure fabrication and also provides a "tool box" of various techniques that can be easily adapted in different fields of applications.
Written for: Nanoscience and nanotechnology researchers and engineers, technical professionals and academic researchers in the fields of electrtonics, mechanical engineering, and chemical engineering.
Authors and Affiliations
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Research Councils (CCLRC), Council for the Central Lab. of the, Didcot, Oxon, United Kingdom
Zheng Cui
Bibliographic Information
Book Title: Nanofabrication
Book Subtitle: Principles, Capabilities and Limits
Authors: Zheng Cui
DOI: https://doi.org/10.1007/978-0-387-75577-9
Publisher: Springer New York, NY
eBook Packages: Chemistry and Materials Science, Chemistry and Material Science (R0)
Copyright Information: Springer-Verlag US 2008
Softcover ISBN: 978-1-4419-4536-5Published: 04 November 2010
eBook ISBN: 978-0-387-75577-9Published: 01 January 2009
Edition Number: 1
Number of Pages: XIV, 343
Number of Illustrations: 177 b/w illustrations
Topics: Nanotechnology, Materials Science, general, Solid Mechanics, Optical and Electronic Materials