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BioNanoFluidic MEMS

  • Book
  • © 2008

Overview

Editors:
  1. Peter J. Hesketh

    1. George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta

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  • Comprehensively shows the interconnection between the interdisciplinary nature of BioNanoFluidics and MEMS
  • Covers BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies
  • Includes hands-on steps for implementation of biosensor fabrication including a discussion of the clean room lithography process and etching, microsensor systems lamination, PDMS moulding, parylene deposition, and others
  • Provides complete coverage of Nano/Microfabrication, Nano Manufacturing and Nano/Micro Integration

Part of the book series: MEMS Reference Shelf (MEMSRS)

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Table of contents (11 chapters)

  1. Front Matter

    Pages I-X
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  2. Nanotechnology: Retrospect and Prospect

    • James D. Meindl
    Pages 1-9

  3. Synthesis of Oxide Nanostructures

    • Chenguo Hu, Hong Liu, Zhong Lin Wang
    Pages 11-36

  4. Nanolithography

    • Raghunath Murali
    Pages 37-62

  5. Nano/Microfabrication Methods for Sensors and NEMS/MEMS

    • Peter J. Hesketh
    Pages 63-130

  6. Micro- and Nanomanufacturing via Molding

    • Harry D. Rowland, William P. King
    Pages 131-151

  7. Temperature Measurement of Microdevices using Thermoreflectance and Raman Thermometry

    • Thomas Beechem, Samuel Graham
    Pages 153-174

  8. Stereolithography and Rapid Prototyping

    • David W. Rosen
    Pages 175-196

  9. Case Studies in Chemical Sensor Development

    • Gary W. Hunter, Jennifer C. Xu, Darby B. Makel
    Pages 197-231

  10. Engineered Nanopores

    • Amir G. Ahmadi, Sankar Nair
    Pages 233-250

  11. Engineering Biomaterial Interfaces Through Micro and Nano-Patterning

    • Joseph L. Charest, William P. King
    Pages 251-277

  12. Biosensors Micro and Nano Integration

    • Ravi Doraiswami
    Pages 279-289

  13. Back Matter

    Pages 291-295
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Keywords

About this book

BioNanoFluidic MEMS explains biosensor development fundamentals and initiates an awareness in engineers and scientists who would like to develop and implement novel biosensors for agriculture, biomedicine, home land security, environmental needs, and disease identification. In addition, the material covered in this book introduces and lays the basic foundation for design, fabrication, testing, and implemention of next generation biosensors through hands-on learning.

Editors and Affiliations

  • George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta

    Peter J. Hesketh

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