Overview
- Presents RF Switches and switching circuit MEMS devices in a unified framework covering all aspects of engineering innovation, design, modeling, fabrication, control and experimental implementation
- Discusses RF switch devices in detail, with both system and component-level circuit integration using micro- and nano-fabrication techniques
- Includes an emphasis on design innovation and experimental relevance rather than basic electromagnetic theory and device physics
- Includes supplementary material: sn.pub/extras
Part of the book series: MEMS Reference Shelf (MEMSRS, volume 5)
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Table of contents (10 chapters)
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Front Matter
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Back Matter
Keywords
About this book
Authors and Affiliations
Bibliographic Information
Book Title: RF MEMS Switches and Integrated Switching Circuits
Authors: Ai-Qun Liu
Series Title: MEMS Reference Shelf
DOI: https://doi.org/10.1007/978-0-387-46262-2
Publisher: Springer New York, NY
eBook Packages: Engineering, Engineering (R0)
Copyright Information: Springer Science+Business Media, LLC 2010
Hardcover ISBN: 978-0-387-46261-5Published: 03 September 2010
Softcover ISBN: 978-1-4614-2656-1Published: 05 November 2012
eBook ISBN: 978-0-387-46262-2Published: 09 August 2010
Series ISSN: 1936-4407
Series E-ISSN: 1936-4415
Edition Number: 1
Number of Pages: X, 274
Topics: Circuits and Systems, Mechanical Engineering, Electronics and Microelectronics, Instrumentation