Overview
- The first comprehensive reference dedicated to the multi-disciplinary area of MEMS / NEMS
- 100 contributing authors from 19 countries
- Comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods
- Includes current medical applications of MEMS technology.
- Provides applications of MEMS to opto-electronic devices
- Broad coverage of MEMS applications in sensors and actuators
- Includes supplementary material: sn.pub/extras
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Table of contents (43 chapters)
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Front Matter
Keywords
About this book
As miniaturization, batch fabrication, and integrated electronics rapidly enable the development of a broad range of smart products, MEMs, MOEMS, and NEMS are creating enormous opportunities for commerce and functionality. This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. The MEMS/NEMS HANDBOOK (Microelectromechanical Systems/Nanoelectromechanical Systems) covers all of the major topics within the subject including design methods, fabrication techniques, manufacturing methods, sensors and actuators, and Micro Optical Electro Mechanical Systems. The many applications of MEMS technology include computer devices, electronics, instrumentation, industrial process control, biotechnology, medicine, chemical systems, office equipment, and communications. More than 100 coauthors from nearly 20 countries present clearly written, self-contained, accessible and comprehensive contributions with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists. The remarkable breadth and depth of the topics spanning this diverse field require the 5-volume extent of this notable reference resource that is based on the work of an internationally recognized board of coauthors.
Reviews
From the Foreword:
The two most valuable features of this major reference work are the breadth of material and the depth of the topics covered. Each volume comprehensively treats a significant and specific subject area of fundamental importance to MEME/NEMS.... Collectively, this material provides tremendous resources for emerging design, fabrication/manufacturing techniques and applications of MEMS/NEMS and MOEMS.... Therefore, the energing techniques, applications, and examples of MEMS/NEMS collected by Professor Leondes in this work provide a wealth of practical ideas and methodologies designed to trigger the development of innovation. The contributors in this major reference work clearly reveal the effectiveness and great significance of the techniques available and with further development the essential role that they will play in the future.
Xuan F Zha
National Institute of Standards and Technology
Gaithersburg, Maryland, USA
July 30, 2005
Editors and Affiliations
Bibliographic Information
Book Title: Mems/Nems
Book Subtitle: (1) Handbook Techniques and Applications Design Methods, (2) Fabrication Techniques, (3) Manufacturing Methods, (4) Sensors and Actuators, (5) Medical Applications and MOEMS
Editors: Cornelius T. Leondes
DOI: https://doi.org/10.1007/b136111
Publisher: Springer New York, NY
eBook Packages: Chemistry and Materials Science, Chemistry and Material Science (R0)
Copyright Information: Springer-Verlag US 2006
Hardcover ISBN: 978-0-387-24520-1Published: 17 May 2006
Softcover ISBN: 978-1-4899-7739-7Published: 23 August 2016
eBook ISBN: 978-0-387-25786-0Published: 08 October 2007
Edition Number: 1
Number of Pages: XVIII, 2094
Topics: Nanotechnology, Electronics and Microelectronics, Instrumentation, Mechanical Engineering, Engineering Design, Optical and Electronic Materials