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Introduction to Focused Ion Beams

Instrumentation, Theory, Techniques and Practice

  • Book
  • © 2005

Overview

Editors:
  1. Lucille A. Giannuzzi

    1. FEI Company, Hillsboro, USA

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    You can also search for this editor in PubMed   Google Scholar

  2. Fred A. Stevie

    1. North Carolina State University, Raleigh, USA

    View editor publications

    You can also search for this editor in PubMed   Google Scholar

  • Only text that discusses and presents the theory directly related to applications and the only one that disscusses the vast applications and techniques used in FIBs and dual platform instruments
  • Includes supplementary material: sn.pub/extras

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Table of contents (15 chapters)

  1. Front Matter

    Pages i-xvii
    Download chapter PDF

  2. The Focused Ion Beam Instrument

    • F. A. Stevie, L. A. Giannuzzi, B. I. Prenitzer
    Pages 1-12

  3. Ion - Solid Interactions

    • Lucille A. Giannuzzi, Brenda I. Prenitzer, Brian W. Kempshall
    Pages 13-52

  4. Focused Ion Beam Gases for Deposition and Enhanced Etch

    • F. A. Stevie, D. P. Griffis, P. E. Russell
    Pages 53-72

  5. Three-Dimensional Nanofabrication Using Focused Ion Beams

    • Takashi Kaito
    Pages 73-86

  6. Device Edits and Modifications

    • Kultaransingh Bobby N. Hooghan
    Pages 87-106

  7. The Uses of Dual Beam FIB in Microelectronic Failure Analysis

    • Becky Holdford
    Pages 107-132

  8. High Resolution Live Imaging of FIB Milling Processes for Optimum Accuracy

    • Peter Gnauck, Peter Hoffrogge, M. Schumann
    Pages 133-142

  9. FIB for Materials Science Applications - a Review

    • M. W. Phaneuf
    Pages 143-172

  10. Practical Aspects of FIB Tem Specimen Preparation

    • Ron Anderson, Stanley J. Klepeis
    Pages 173-200

  11. FIB Lift-Out Specimen Preparation Techniques

    • L. A. Giannuzzi, B. W. Kempshall, S. M. Schwarz, J. K. Lomness, B. I. Prenitzer, F. A. Stevie
    Pages 201-228

  12. A FIB Micro-Sampling Technique and a Site Specific TEM Specimen Preparation Method

    • T. Kamino, T. Yaguchi, T. Hashimoto, T. Ohnishi, K. Umemura
    Pages 229-245

  13. Dual-Beam (FIB-SEM) Systems

    • Richard J. Young, Mary V. Moore
    Pages 247-268

  14. Focused Ion Beam Secondary Ion Mass Spectrometry (FIB-SIMS)

    • F. A. Stevie
    Pages 269-280

  15. Quantitative Three-Dimensional Analysis Using Focused Ion Beam Microscopy

    • D. N. Dunn, A. J. Kubis, R. Hull
    Pages 281-300

  16. Application of FIB in Combination with Auger Electron Spectroscopy

    • E. L. Principe
    Pages 301-327

  17. Back Matter

    Pages 329-357
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About this book

Introduction to Focused Ion Beams is geared towards techniques and applications. This is the only text that discusses and presents the theory directly related to applications and the only one that discusses the vast applications and techniques used in FIBs and dual platform instruments.

Editors and Affiliations

  • FEI Company, Hillsboro, USA

    Lucille A. Giannuzzi

  • North Carolina State University, Raleigh, USA

    Fred A. Stevie

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