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Mechanics of Microelectromechanical Systems

  • Textbook
  • © 2005

Overview

Authors:
  1. Nicolae Lobontiu
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  2. Ephrahim Garcia
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  • Provides an in-depth study to the mechanics of microsystems (MEMS) by developing a model-based approach to design

  • Microcantilevers, flexible connectors, microsuspensions, microtransduction (actuation/sensing), static equilibrium, microfabrication, precision and scaling are thoroughly covered and accompanied by numerous examples and problems

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Table of contents (6 chapters)

  1. Front Matter

    Pages i-xi
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  2. Stiffness Basics

    Pages 1-64

  3. Microcantilevers, Microhinges, Microbridges

    Pages 65-130

  4. Microsuspensions

    Pages 131-182

  5. Microtransduction: Actuation and Sensing

    Pages 183-262

  6. Static Response of Mems

    Pages 263-342

  7. Microfabrication, Materials, Precision and Scaling

    Pages 343-394

  8. Back Matter

    Pages 395-405
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Keywords

About this book

This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer’s viewpoint as devices that transform an input form of energy, such as thermal, electrostatic, electromagnetic or optical, into output mechanical motion (in the case of actuation) or that can operate with the reversed functionality (as in sensors) and convert an external stimulus, such as mechanical motion, into (generally) electric energy. The impetus of this proposal stems from the perception that such an approach might contribute to a more solid understanding of the principles governing the mechanics of MEMS, and would hopefully enhance the efficiency of modeling and designing reliable and desirably-optimized microsystems. The work represents an attempt at both extending and deepening the mechanical-based approach to MEMS in the static domain by providing simple, yet reliable tools that are applicable to micromechanism design through current fabrication technologies. Lumped-parameter stiffness and compliance properties of flexible components are derived both analytically (as closed-form solutions) and as simplified (engineering) formulas. Also studied are the principal means of actuation/sensing and their integration into the overall microsystem. Various examples of MEMS are studied in order to better illustrate the presentation of the different modeling principles and algorithms. Through its objective, approach and scope, this book offers a novel and systematic insight into the MEMS domain and complements existing work in the literature addressing part of the material developed herein.

Reviews

From the reviews:

“The field of microelectromechanical systems, or MEMS, has been growing at an amazing pace over the past two decades. … the book could serve as a useful reference for researchers and practicing engineers since it covers many important mechanical aspects of microelectromechanical systems.” (Reza Moheimani, IEEE Control Systems Magazine, Vol. 27, April, 2007)

Bibliographic Information

  • Book Title: Mechanics of Microelectromechanical Systems

  • Authors: Nicolae Lobontiu, Ephrahim Garcia

  • DOI: https://doi.org/10.1007/b100026

  • Publisher: Springer New York, NY

  • eBook Packages: Engineering, Engineering (R0)

  • Copyright Information: Springer-Verlag US 2005

  • Hardcover ISBN: 978-1-4020-8013-5Published: 30 September 2004

  • Softcover ISBN: 978-1-4899-8116-5Published: 21 November 2014

  • eBook ISBN: 978-0-387-23037-5Published: 16 January 2006

  • Edition Number: 1

  • Number of Pages: XI, 405

  • Topics: Mechanical Engineering

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