NATO Science for Peace and Security Series B: Physics and Biophysics

Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators

Editors: Gusev, Evgeni, Garfunkel, Eric, Dideikin, Arthur (Eds.)

  • State-of-the-art reviews from leading experts in the field of MEMS/NEMS devices and technologies
  • The subject is covered from different angles, including technology, device designs, processing aspects, materials properties, characterization, microstructural studies
  • Broad coverage from technology fundamentals all the way to device applications
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eBook $129.00
price for USA (gross)
  • ISBN 978-90-481-3807-4
  • Digitally watermarked, DRM-free
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  • Immediate eBook download after purchase
Hardcover $319.00
price for USA
  • ISBN 978-90-481-3805-0
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $169.00
price for USA
  • ISBN 978-90-481-3806-7
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
About this book

A NATO Advanced Research Workshop (ARW) entitled “Advanced Materials and Technologies for Micro/Nano Devices, Sensors and Actuators” was held in St. Petersburg, Russia, from June 29 to July 2, 2009. The main goal of the Workshop was to examine (at a fundamental level) the very complex scientific issues that pertain to the use of micro- and nano-electromechanical systems (MEMS and NEMS), devices and technologies in next generation commercial and defen- related applications. Micro- and nano-electromechanical systems represent rather broad and diverse technological areas, such as optical systems (micromirrors, waveguides, optical sensors, integrated subsystems), life sciences and lab equipment (micropumps, membranes, lab-on-chip, membranes, microfluidics), sensors (bio-sensors, chemical sensors, gas-phase sensors, sensors integrated with electronics) and RF applications for signal transmission (variable capacitors, tunable filters and antennas, switches, resonators). From a scientific viewpoint, this is a very multi-disciplinary field, including micro- and nano-mechanics (such as stresses in structural materials), electronic effects (e. g. charge transfer), general electrostatics, materials science, surface chemistry, interface science, (nano)tribology, and optics. It is obvious that in order to overcome the problems surrounding next-generation MEMS/NEMS devices and applications it is necessary to tackle them from different angles: theoreticians need to speak with mechanical engineers, and device engineers and modelers to listen to surface physicists. It was therefore one of the main objectives of the workshop to bring together a multidisciplinary team of distinguished researchers.

Table of contents (24 chapters)

  • History of Early Research on MEMS in Russia (U.S.S.R.)

    Vaganov, Vladimir

    Pages 3-15

  • Challenges of Complete CMOS/MEMS Systems Integration

    Vaganov, Vladimir

    Pages 17-30

  • MEMS for Practical Applications

    Esashi, Masayoshi

    Pages 31-40

  • Nanochip: A MEMS-Based Ultra-High Data Density Memory Device

    Belov, Nickolai (et al.)

    Pages 41-65

  • Low Cost Silicon Coriolis’ Gyroscope Paves the Way to Consumer IMU

    Vigna, Benedetto (et al.)

    Pages 67-74

Buy this book

eBook $129.00
price for USA (gross)
  • ISBN 978-90-481-3807-4
  • Digitally watermarked, DRM-free
  • Included format: EPUB, PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $319.00
price for USA
  • ISBN 978-90-481-3805-0
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $169.00
price for USA
  • ISBN 978-90-481-3806-7
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
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Bibliographic Information

Bibliographic Information
Book Title
Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators
Editors
  • Evgeni Gusev
  • Eric Garfunkel
  • Arthur Dideikin
Series Title
NATO Science for Peace and Security Series B: Physics and Biophysics
Copyright
2010
Publisher
Springer Netherlands
Copyright Holder
Springer Science+Business Media B.V.
eBook ISBN
978-90-481-3807-4
DOI
10.1007/978-90-481-3807-4
Hardcover ISBN
978-90-481-3805-0
Softcover ISBN
978-90-481-3806-7
Series ISSN
1874-6500
Edition Number
1
Number of Pages
XI, 314
Topics