Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting

1. Front Matter

   Pages i-xx

   PDF

2. Introduction

   • Xiao-Sheng Zhang

   Pages 1-21

3. Micro-/Nanointegrated Fabrication Technique for Silicon

   • Xiao-Sheng Zhang

   Pages 23-47

4. Micro-/Nanointegrated Fabrication Technique for Flexible Materials

   • Xiao-Sheng Zhang

   Pages 49-74

5. Flexible Triboelectric Nanogenerators: Principle and Fabrication

   • Xiao-Sheng Zhang

   Pages 75-91

6. Flexible Triboelectric Nanogenerators: Enhancement and Applications

   • Xiao-Sheng Zhang

   Pages 93-117

7. Summary and Perspectives

   • Xiao-Sheng Zhang

   Pages 119-122

This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.

• Flexible Material
• Improved DRIE Process
• Micro/Nano Hierarchical Structures
• Micro/Nano Integrated Fabrication
• Microenergy Source
• Nanogenerator
• Silicon
• Soft Lithography

• Institute of Microelectronics, Peking University, Beijing, China

  Xiao-Sheng Zhang

Dr. Zhang Xiao-Sheng is currently working as a postdoctoral researcher at École Polytechnique Fédérale de Lausanne (EPFL),
Switzerland, and as a visiting researcher at the University of Tokyo. His research interests mainly include three areas:
(1) micro/nano integrated fabrication technology;
(2) micro/nano energy technology;
(3) smart drug delivery system.

HONORS & AWARDS
• 2014 Excellent Doctoral Dissertation of Peking University
• 2014 Outstanding Graduation Student of Peking University
• 2014 Outstanding Graduation Student of Beijing City
• 2013 National Scholarship for Outstanding Graduate Students
• 2013 Academic Top 10 Graduate Student, Peking University
• 2013 Innovation Award, Peking University
• 2013 Academic Top 10 Graduate Student, School of Electronics Engineering and Computer Science, Peking University
• 2013 Best Paper Award, The 11th Annual National Academic Conference for Ph.D. Candidates
• 2012 Lu Jiaxi Outstanding Graduate Student Award, Lu Jiaxi Education Foundation (award 20 students nationwide each year)
• 2012 Tokyo Electron Limited (TEL) Scholarship, Peking University
• 2012 Founder Scholarship, Peking University
• 2011 Merit Student Award, Peking University
• 2011 Best Poster Award, 4th Intl. Conf. on Nanosci. & Tech. (ChinaNano2011), Beijing
• 2011 Best Group Award, Platinum Level, 4th Asia Nanotech Camp 2011 (ANC2011), Korea
• 2011 Best Poster Award, Silver Level, 4th Asia Nanotech Camp 2011 (ANC2011), Korea
• 2011 Best Oral Presentation, 2011 Beijing Microelectronics Forum for Ph.D. Students
• 2010 Outstanding Graduate Student Leader Award, University of Electronic Science and Technology of China
• 2003-2007 Outstanding Student Scholarship for three consecutive years & Outstanding Student Leader Award, University of Electronic Science and Technology of China

JOURNAL PUBLICATIONS
1. Xiao-Sheng Zhang, M. D. Han, R. X. Wang, F. Y. Zhu, Z. H. Li, W. Wang, H. X. Zhang. Frequency-multiplication high-output triboelectric nanogenerator for sustainably powering biomedical microsystems. Nano Letters, 2013, 13, 1168-1172.
2. Xiao-Sheng Zhang, F. Y. Zhu, M. D. Han, X. M. Sun, X. H. Peng, H. X. Zhang. Self-cleaning poly(dimethylsiloxane) film with functional micro/nano hierarchical structures. Langmuir, 2013, 29, 10769-10775.
3. Xiao-Sheng Zhang, M. D. Han, B. Meng, H. X. Zhang. High Performance Triboelectric Nanogenerators Based on Large-Scale Mass-Production Fabrication Technologies. Nano Energy, 2015, 11, 304-322.(Review Article)
4. Xiao-Sheng Zhang, M. D. Han, R. X. Wang, B. Meng, F. Y. Zhu, X. M. Sun, W. Hu, W. Wang, Z. H. Li, H. X. Zhang. High-Performance Triboelectric Nanogenerator with Enhanced Energy Density Based on Single-Step Fluorocarbon Plasma Treatment. Nano Energy, 2014, 4, 123-131.
5. H. Zhang*, Xiao-Sheng Zhang*, X. Cheng*, Y. Liu, M. Han, X. Xue, S. Wang, F. Yang, A.S. Smitha, H. Zhang, Z.Xu. A flexible and implantable piezoelectric generator harvesting energy from the pulsation of ascending aorta: In vitro and in vivo studies. Nano Energy, 2015, 12, 296-304. (*Co-First Author)
6. M.D. Han*, Xiao-Sheng Zhang*, B. Meng, W. Liu, W. Tang, X. M. Sun, H. X. Zhang. r-Shaped hybrid nanogenerator with enhanced piezoelectricity. ACS Nano, 2013, 7, 8554-8560. (*Co-First Author)
7. Nicolas J. Peter*, Xiao-Sheng Zhang*, S. G. Chu, F. Y. Zhu, H. Seidel, H. X. Zhang. Tunable wetting behavior of nanostructured poly(dimethylsiloxane) by plasma combination treatments. Applied Physics Letters, 2012, 101, 221601. (*Co-First Author)
8. Xiao-Sheng Zhang, B. Meng, F.Y. Zhu, W. Tang, H.X. Zhang. Switchable Wetting & Flexible SiC Thin Film with Nanostructures for Microfluidic Surface-Enhanced Raman Scattering Sensors. Sensors and Actuators A: Physical, 2014, 208, 166-173.
9. Xiao-Sheng Zhang, Z.M. Su, M.D. Han, B. Meng, F.Y. Zhu, H.X. Zhang. Fabrication and characterization of the functional parylene-C film with micro/nano hierarchical structures. Microelectronic Engineering, 2015, DOI: 10.1016/j.mee.2015.01.038.
10. Xiao-Sheng Zhang, Q. L. Di, F. Y. Zhu, G. Y. Sun, H. X. Zhang. Superhydrophobic micro/nano dual-scale structures. Journal of Nanoscience and Nanotechnology, 2013, 13, 1539-1542.
11. Xiao-Sheng Zhang, F. Y. Zhu, G. Y. Sun, H. X. Zhang. Fabrication and characterization of squama-shape micro/nano multi-scale silicon material. Science in China Series E, 2012, 55, 3395-3400.
12. Xiao-Sheng Zhang, Q. L. Di, F. Y. Zhu, G. Y. Sun, H. X. Zhang. Wideband anti-reflective micro/nano dual-scale structures: fabrication and optical Properties. Micro & Nano Letters, 2011, 6, 947-950.

Policies and ethics