Overview
- Provides a thorough revision of the first edition
- Covers important topics in the field of micro systems
- Written by an expert in the field
- Includes supplementary material: sn.pub/extras
Part of the book series: RWTHedition (RWTH)
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Table of contents (24 chapters)
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Front Matter
Keywords
About this book
This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro systems are also provided. Readers do not require previous knowledge of fabrication processes. This second edition of the volume is a thoroughly revised and extended update. The target audience primarily comprises experts in the field of micro systems and the book is also suitable for graduate engineering students. For quick reference, equations are presented in tables that can be found in an index at the end of the book.
Authors and Affiliations
Bibliographic Information
Book Title: Introduction to Microsystem Design
Authors: Werner Karl Schomburg
Series Title: RWTHedition
DOI: https://doi.org/10.1007/978-3-662-47023-7
Publisher: Springer Berlin, Heidelberg
eBook Packages: Engineering, Engineering (R0)
Copyright Information: Springer-Verlag Berlin Heidelberg 2015
Hardcover ISBN: 978-3-662-47022-0Published: 08 July 2015
Softcover ISBN: 978-3-662-50733-9Published: 17 October 2016
eBook ISBN: 978-3-662-47023-7Published: 25 June 2015
Series ISSN: 1865-0899
Series E-ISSN: 1865-0902
Edition Number: 2
Number of Pages: XXIV, 374
Number of Illustrations: 48 b/w illustrations, 332 illustrations in colour
Topics: Electronics and Microelectronics, Instrumentation, Circuits and Systems, Nanotechnology and Microengineering