Micro and Nano Fabrication

Tools and Processes

Authors: Gatzen, Hans H., Saile, Volker, Leuthold, Jürg

  • Describes the tools required for fabricating MNEMS systems
  • Gives insight into the process technologies
  • Fits for practitioners and students of MNEMS
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Buy this book

eBook $69.99
price for USA (gross)
  • ISBN 978-3-662-44395-8
  • Digitally watermarked, DRM-free
  • Included format: EPUB, PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $99.00
price for USA
  • ISBN 978-3-662-44394-1
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $99.00
price for USA
  • Customers within the U.S. and Canada please contact Customer Service at 1-800-777-4643, Latin America please contact us at +1-212-460-1500 (Weekdays 8:30am – 5:30pm ET) to place your order.
  • Due: November 17, 2016
  • ISBN 978-3-662-50826-8
  • Free shipping for individuals worldwide
About this Textbook

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

About the authors

Hans Gatzen received a PhD equivalent in Mechanical Engineering from the RWTH Aachen in Aachen, Germany, and held various positions in the computer peripherals industry in Germany and the U.S. from 1973 to 1992. In 1992, he founded the Institute for Microtechnology (imt) at the Hanover University in Hanover, Germany (now Leibniz Universität Hannover) and was its director until his retirement in 2010. He is a Fellow of the American Society of Mechanical Engineers (ASME) and a member of Acatech (National Academy of Science and Engineering).

Volker Saile received a PhD in Physics from the Ludwigs-Maximilians-Universitaet München (LMU), and was later employed as a Staff Scientist at the Deutsches Elektronen-Synchrotron DESY in Hamburg, Germany, until 1989. From 1989 to 1998, he served as the Director of the J. Bennett Johnston, Sr., Center for Advanced Microstructures and Devices (CAMD), Baton Rouge, Louisana, USA. Since 1998, he is Professor of Microstructure Technology at the Karlsruhe Institute of Technology (KIT). Currently, he serves as Head of the KIT Division 5, Physics and Mathematics.

Juerg Leuthold is the head of the Institute of Electromagnetic Fields (IEF) at ETH Zurich, Switzerland. His research interests are in the field of nano-photonics, plasmonics, integrated optics and optical communications. From 2004 to 2013 he was a full Professor at the Karlsruhe Institute of Technology (KIT) in Germany and from 1999 to 2004 he was affiliated with Bell Labs,

Lucent Technologies.

 

Reviews

“The book is clearly written and easy to read. The various topics are balanced and well organized. … The numerous figures and schematics are the most useful tools of the book. … It is useful to students and newcomers, but also experts may find it a good reference because there are some useful aspects not easily found in other books … . the book offers a good opportunity to go through the basic semiconductor fabrication technologies.” (Rosaria A. Puglisi, MRS Bulletin, Vol. 40, October, 2015)

“Provide an excellent summary and explanation for nearly every micro and nano fabrication subject that readers could possibly be interested in learning about. … this work is useful as an instructional aid with comprehension questions at the end of each chapter, as well as a chapter that contains a start-to-finish example of device fabrication. … Summing Up: Recommended. Lower- and upper-division undergraduates, graduate students, and two-year technical program students.” (N. M. Fahrenkopf, Choice, Vol. 52 (12), August, 2015)


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Table of contents (11 chapters)

  • Introduction—MEMS, a Historical Perspective

    Gatzen, Hans H. (et al.)

    Pages 1-5

  • Vacuum Technology

    Gatzen, Hans H. (et al.)

    Pages 7-63

  • Deposition Technologies

    Gatzen, Hans H. (et al.)

    Pages 65-203

  • Etching Technologies

    Gatzen, Hans H. (et al.)

    Pages 205-272

  • Doping and Surface Modification

    Gatzen, Hans H. (et al.)

    Pages 273-312

Buy this book

eBook $69.99
price for USA (gross)
  • ISBN 978-3-662-44395-8
  • Digitally watermarked, DRM-free
  • Included format: EPUB, PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $99.00
price for USA
  • ISBN 978-3-662-44394-1
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $99.00
price for USA
  • Customers within the U.S. and Canada please contact Customer Service at 1-800-777-4643, Latin America please contact us at +1-212-460-1500 (Weekdays 8:30am – 5:30pm ET) to place your order.
  • Due: November 17, 2016
  • ISBN 978-3-662-50826-8
  • Free shipping for individuals worldwide
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Bibliographic Information

Bibliographic Information
Book Title
Micro and Nano Fabrication
Book Subtitle
Tools and Processes
Authors
Copyright
2015
Publisher
Springer-Verlag Berlin Heidelberg
Copyright Holder
Springer-Verlag Berlin Heidelberg
Distribution Rights
Distribution rights for India: Researchco Book Centre, New Delhi, India
eBook ISBN
978-3-662-44395-8
DOI
10.1007/978-3-662-44395-8
Hardcover ISBN
978-3-662-44394-1
Softcover ISBN
978-3-662-50826-8
Edition Number
1
Number of Pages
XXVI, 519
Number of Illustrations and Tables
303 b/w illustrations, 54 illustrations in colour
Topics