Overview
- First book on modelling of the processing techniques for microsystems
- Focusses on the fabrication of high-aspect ratio microparts, namely ion beam micromachining, x-ray lithography, laser chemical vapor deposition, laser photopolimerization, laser ablation
- Includes supplementary material: sn.pub/extras
Part of the book series: Microtechnology and MEMS (MEMS)
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Table of contents (6 chapters)
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Front Matter
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Back Matter
Keywords
About this book
This book addresses modeling of systems that are important to the fabrication of three-dimensional microstructures. Selected topics are ion beam micromachining, x-ray lithography, laser chemical vapor deposition, photopolymerization, laser ablation, and thin films. Models simulating the behavior of these systems are presented, graphically illusratted, and discussed in the light of experimental results. Knowledge gained from such models is essential for system operation and optimization. This book is unique in that it focuses on high aspect ratio microtechnology. It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development for enhancing the accuracy and precision of microfabrication systems for commercial applications.
Reviews
From the reviews:
"This book is aimed at people working on simulation and optimization process fabrication of Microelectromechanical Systems (MEMS). … the book provides a fairly complete view of the modeling of microfabrication processes. … ‘It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development for enhancing the accuracy and precision of microfabrication systems for commercial applications’." (Grégory Guisbiers, Physicalia, Vol. 26 (1), 2004)
Authors and Affiliations
Bibliographic Information
Book Title: Modelling of Microfabrication Systems
Authors: Raja Nassar, Weizhong Dai
Series Title: Microtechnology and MEMS
DOI: https://doi.org/10.1007/978-3-662-08792-3
Publisher: Springer Berlin, Heidelberg
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eBook Packages: Springer Book Archive
Copyright Information: Springer-Verlag Berlin Heidelberg 2003
Hardcover ISBN: 978-3-540-00252-9Published: 13 June 2003
Softcover ISBN: 978-3-642-05536-2Published: 08 December 2010
eBook ISBN: 978-3-662-08792-3Published: 09 March 2013
Series ISSN: 1615-8326
Series E-ISSN: 2365-0680
Edition Number: 1
Number of Pages: X, 270
Topics: Nanotechnology and Microengineering, Simulation and Modeling, Numerical Analysis, Electronics and Microelectronics, Instrumentation, Nanotechnology