Springer Series in Materials Science

Molecular Beam Epitaxy

Fundamentals and Current Status

Authors: Herman, Marian A., Sitter, Helmut

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eBook $69.99
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  • ISBN 978-3-642-80060-3
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  • Immediate eBook download after purchase
Softcover $99.00
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  • ISBN 978-3-642-80062-7
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About this Textbook

Molecular Beam Epitaxy describes a technique in wide-spread use for the production of high-quality semiconductor devices. This monograph discusses the most important aspects of an MBE apparatus, the physics and chemistry of the crystallization of various materials and device structures, and the characterization methods that relate the structural para- meters of the grown (or growing) field or structure to the technologically relevant parameters of the crystallization procedure. In the present second edition two new fields of activity, which emerged in the 1990s have been addressed. These are: (i) crystallization of as-grown low-dimensional heterostructures, mainly quantum wires and quantum dots, and (ii) in-growth control of the MBE crystallization process of strained-layer structures in order to achieve the highly pre- ferred mode of crystallization, the perfect layer-by-layer growth. A substantial part of the "first edition text", which lost its present-day interest has been removed to have sufficiant space for the most current topics in MBE.

Table of contents (8 chapters)

  • Introduction

    Herman, Marian A. (et al.)

    Pages 1-31

  • Sources of Atomic and Molecular Beams

    Herman, Marian A. (et al.)

    Pages 33-79

  • High-Vacuum Growth and Processing Systems

    Herman, Marian A. (et al.)

    Pages 81-134

  • Characterization Techniques

    Herman, Marian A. (et al.)

    Pages 135-227

  • MBE Growth Processes of Lattice-Matched Structures

    Herman, Marian A. (et al.)

    Pages 229-288

Buy this book

eBook $69.99
price for USA (gross)
  • ISBN 978-3-642-80060-3
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Softcover $99.00
price for USA
  • ISBN 978-3-642-80062-7
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
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Bibliographic Information

Bibliographic Information
Book Title
Molecular Beam Epitaxy
Book Subtitle
Fundamentals and Current Status
Authors
Series Title
Springer Series in Materials Science
Series Volume
7
Copyright
1996
Publisher
Springer-Verlag Berlin Heidelberg
Copyright Holder
Springer-Verlag Berlin Heidelberg
eBook ISBN
978-3-642-80060-3
DOI
10.1007/978-3-642-80060-3
Softcover ISBN
978-3-642-80062-7
Series ISSN
0933-033X
Edition Number
2
Number of Pages
XIV, 453
Number of Illustrations and Tables
28 b/w illustrations, 25 illustrations in colour
Topics