Crystals

Silicon Chemical Etching

Editors: Grabmaier, J. (Ed.)

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About this book

In the first contribution to this volume we read that the world-wide production of single­ crystal silicon amounts to some 2000 metric tons per year. Given the size of present-day silicon-crystals, this number is equivalent to 100000 silicon-crystals grown every year by either the Czochralski (80%) or the floating-zone (20%) technique. But, to the best of my knowledge, no coherent and comprehensive article has been written that deals with "the art and science", as well as the practical and technical aspects of growing silicon­ crystals by the Czochralski technique. The same could be said about the floating-zone technique were it not for the review article by W. Dietze, W. Keller and A. Miihlbauer which was published in the preceding Volume 5 ("Silicon") of this series (and for a monograph by two of the above authors published about the same time). As editor of this volume I am very glad to have succeeded in persuading two scien­ tists, W. Zulehner and D. Huber, of Wacker-Chemitronic GmbH - the world's largest producer of silicon-crystals - to write a comprehensive article about the practical and scientific aspects of growing silicon-crystals by the Czochralski method and about silicon­ wafer manufacture. I am sure that many scientists or engineers who work with silicon­ crystals -be it in the laboratory or in a production environment - will profit from the first article in this volume.

Table of contents (2 chapter)

  • Czochralski-Grown Silicon

    Werner Zulehner, Diethart Huber

    Pages 1-143

    Buy Chapter $29.95
  • Principles of Chemical Etching — The Art and Science of Etching Crystals

    Robert B. Heimann

    Pages 173-224

    Buy Chapter $29.95
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Buy this book

eBook $99.00 net
( price for USA )
  • ISBN 978-3-642-68765-5
  • digitally watermarked, no DRM
  • included format: PDF
  • eBooks can be used on all Reading Devices
Softcover $129.00 net
( price for USA )
  • ISBN 978-3-642-68767-9
  • free shipping for individuals worldwide
  • usually dispatched within 3 to 5 business days

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Bibliographic Information

Bibliographic Information
Book Title
Silicon Chemical Etching
Series Title
Crystals
Series Volume
8
Copyright
1982
Publisher
Springer-Verlag Berlin Heidelberg
Copyright Holder
Springer-Verlag Berlin Heidelberg
eBook ISBN
978-3-642-68765-5
DOI
10.1007/978-3-642-68765-5
Softcover ISBN
978-3-642-68767-9
Series ISSN
0172-5076
Edition Number
1
Topics