Ellipsometry at the Nanoscale

1. Front Matter

   Pages i-xxiv

   PDF

2. A Brief History and State of the Art of Ellipsometry

   • Eugene A. Irene

   Pages 1-30

3. Advanced Mueller Ellipsometry Instrumentation and Data Analysis

   • Enric Garcia-Caurel, Razvigor Ossikovski, Martin Foldyna, Angelo Pierangelo, Bernard Drévillon, Antonello De Martino

   Pages 31-143

4. Data Analysis for Nanomaterials: Effective Medium Approximation, Its Limits and Implementations

   • Josef Humlicek

   Pages 145-178

5. Relationship Between Surface Morphology and Effective Medium Roughness

   • Angel Yanguas-Gil, Herbert Wormeester

   Pages 179-202

6. Plasmonics and Effective-Medium Theory

   • David E. Aspnes

   Pages 203-224

7. Thin Films of Nanostructured Noble Metals

   • Herbert Wormeester, Thomas W. H. Oates

   Pages 225-256

8. Spectroscopic Ellipsometry on Metallic Gratings

   • Michael Bergmair, Kurt Hingerl, Peter Zeppenfeld

   Pages 257-311

9. Ellipsometry at the Nanostructure

   • Yasuhiro Mizutani, Yukitoshi Otani

   Pages 313-323

10. Spectroscopic Ellipsometry and Magneto-Optical Kerr Spectroscopy of Magnetic Garnet Thin Films Incorporating Plasmonic Nanoparticles

    • Satoshi Tomita

    Pages 325-339

11. Generalized Ellipsometry Characterization of Sculptured Thin Films Made by Glancing Angle Deposition

    • Daniel Schmidt, Eva Schubert, Mathias Schubert

    Pages 341-410

12. THz Generalized Ellipsometry Characterization of Highly-Ordered Three-Dimensional Nanostructures

    • Tino Hofmann, Daniel Schmidt, Mathias Schubert

    Pages 411-428

13. Infrared Ellipsometric Investigations of Free Carriers and Lattice Vibrations in Superconducting Cuprates

    • Jiří Chaloupka, Dominik Munzar, Josef Humlíček

    Pages 429-451

14. Real-Time Ellipsometry for Probing Charge-Transfer Processes at the Nanoscale

    • Maria Losurdo, April S. Brown, Giovanni Bruno

    Pages 453-491

15. Polarimetric and Other Optical Probes for the Solid–Liquid Interface

    • Kurt Hingerl

    Pages 493-527

16. Spectroscopic Ellipsometry for Functional Nano-Layers of Flexible Organic Electronic Devices

    • Stergios Logothetidis, Argiris Laskarakis

    Pages 529-556

17. Spectroscopic Ellipsometry of Nanoscale Materials for Semiconductor Device Applications

    • Alain C. Diebold, Florence J. Nelson, Vimal K. Kamineni

    Pages 557-581

18. Ellipsometry of Semiconductor Nanocrystals

    • Peter Petrik, Miklos Fried

    Pages 583-606

19. Spectroscopic Ellipsometry for Inline Process Control in the Semiconductor Industry

    • Stefan Zollner

    Pages 607-627

20. Thin Film Applications in Research and Industry Characterized by Spectroscopic Ellipsometry

    • Denis Cattelan, Céline Eypert, Marzouk Kloul, Mélanie Gaillet, Jean-Paul Gaston, Roland Seitz et al.

    Pages 629-667

This book presents and introduces ellipsometry in nanoscience and nanotechnology making a bridge between the classical and nanoscale optical behaviour of materials. It delineates the role of the non-destructive and non-invasive optical diagnostics of ellipsometry in improving science and technology of nanomaterials and related processes by illustrating its exploitation, ranging from fundamental studies of the physics and chemistry of nanostructures to the ultimate goal of turnkey manufacturing control. This book is written for a broad readership: materials scientists, researchers, engineers, as well as students and nanotechnology operators who want to deepen their knowledge about both basics and applications of ellipsometry to nanoscale phenomena. It starts as a general introduction for people curious to enter the fields of ellipsometry and polarimetry applied to nanomaterials and progresses to articles by experts on specific fields that span from plasmonics, optics, to semiconductors and flexible electronics. The core belief reflected in this book is that ellipsometry applied at the nanoscale offers new ways of addressing many current needs. The book also explores forward-looking potential applications.

• Correlation measurements
• Kerr Spectroscopy
• Plasmonics theory
• Polarimetry
• Polarized light

• CNR Bari, Ist. Metodologie Inorganiche, Università Bari, Bari, Italy

  Maria Losurdo

• Zentrum für Oberflächen- und, Nanoanalytik (ZONA), Universität Linz, Linz, Austria

  Kurt Hingerl

Policies and ethics