Graduate Texts in Physics

Epitaxy of Semiconductors

Introduction to Physical Principles

Authors: Pohl, Udo W.

  • Provides the essentials for a comprehensive graduate course on crystal growth of semiconductor heterostructures
  • Covers thermodynamics and kinetics of layer growth and major growth techniques
  • Gives detailed information to apply the crystal growth techniques
  • Written in tutorial style
  • Contains many instructive diagrams
  • Supports learning with exercises after each chapter and solutions in the end of the book
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eBook $69.99
price for USA (gross)
  • ISBN 978-3-642-32970-8
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  • Included format: EPUB, PDF
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  • Immediate eBook download after purchase
Hardcover $89.95
price for USA
  • ISBN 978-3-642-32969-2
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $89.95
price for USA
  • ISBN 978-3-642-43331-3
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Rent the ebook  
  • Rental duration: 1 or 6 month
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About this Textbook

Introduction to Epitaxy provides the essential information for a comprehensive upper-level graduate course treating the crystalline growth of semiconductor heterostructures. Heteroepitaxy represents the basis of advanced electronic and optoelectronic devices today and is considered one of the top fields in materials research. The book covers the structural and electronic properties of strained epitaxial layers, the thermodynamics and kinetics of layer growth, and the description of the major growth techniques metalorganic vapor phase epitaxy, molecular beam epitaxy and liquid phase epitaxy. Cubic semiconductors, strain relaxation by misfit dislocations, strain and confinement effects on electronic states, surface structures and processes during nucleation and growth are treated in detail. The Introduction to Epitaxy requires only little knowledge on solid-state physics. Students of natural sciences, materials science and electrical engineering as well as their lecturers benefit from elementary introductions to theory and practice of epitaxial growth, supported by pertinent references and over 200 detailed illustrations.

About the authors

Udo W. Pohl received the B.S. degree (German pre-degree) from the Technical University of Aachen, Aachen, Germany, in 1978, and the M.S. (Diploma) and Ph.D. degrees from the Technical University of Berlin, Berlin, Germany, in 1983 and 1988, respectively, all in physics. He is currently principal investigator in the Institute of Solid State Physics, Technical University of Berlin. In 2009, he was appointed as an Adjunct Professor of Physics at Technical University of Berlin. He has authored about 200 journal articles and conference papers, ten book contributions, and two patents, His current research interests include epitaxy and physics of semiconductor nanostructures and devices.

Table of contents (7 chapters)

Buy this book

eBook $69.99
price for USA (gross)
  • ISBN 978-3-642-32970-8
  • Digitally watermarked, DRM-free
  • Included format: EPUB, PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $89.95
price for USA
  • ISBN 978-3-642-32969-2
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $89.95
price for USA
  • ISBN 978-3-642-43331-3
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Rent the ebook  
  • Rental duration: 1 or 6 month
  • low-cost access
  • online reader with highlighting and note-making option
  • can be used across all devices
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Bibliographic Information

Bibliographic Information
Book Title
Epitaxy of Semiconductors
Book Subtitle
Introduction to Physical Principles
Authors
Series Title
Graduate Texts in Physics
Copyright
2013
Publisher
Springer-Verlag Berlin Heidelberg
Copyright Holder
Springer-Verlag Berlin Heidelberg
eBook ISBN
978-3-642-32970-8
DOI
10.1007/978-3-642-32970-8
Hardcover ISBN
978-3-642-32969-2
Softcover ISBN
978-3-642-43331-3
Series ISSN
1868-4513
Edition Number
1
Number of Pages
XIV, 325
Topics