Springer Theses

Photomodulated Optical Reflectance

A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon

Authors: Bogdanowicz, Janusz

  • Selected as an outstanding contribution by K.U. Leuven
  • Reports significant advances in non-destructive testing of semiconductors
  • New approaches have potential for industrial application
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  • ISBN 978-3-642-30108-7
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About this book

One of the critical issues in semiconductor technology is the precise electrical characterization of ultra-shallow junctions. Among the plethora of measurement techniques, the optical reflectance approach developed in this work is the sole concept that does not require physical contact, making it suitable for non-invasive in-line metrology. This work develops extensively all the fundamental physical models of the photomodulated optical reflectance technique and introduces novel approaches that extend its applicability from dose monitoring towards detailed carrier profile reconstruction. It represents a significant breakthrough in junction metrology with potential for industrial implementation.

Table of contents (8 chapters)

  • Introduction

    Bogdanowicz, Janusz

    Pages 1-20

  • Theory of Perturbation of the Reflectance

    Bogdanowicz, Janusz

    Pages 21-37

  • Theory of Perturbation of the Refractive Index

    Bogdanowicz, Janusz

    Pages 39-51

  • Theory of Carrier and Heat Transport in Homogeneously Doped Silicon

    Bogdanowicz, Janusz

    Pages 53-99

  • Extension of the Transport Theory to Ultra-Shallow Doped Silicon Layers

    Bogdanowicz, Janusz

    Pages 101-113

Buy this book

eBook $99.00
price for USA (gross)
  • ISBN 978-3-642-30108-7
  • Digitally watermarked, DRM-free
  • Included format: PDF, EPUB
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $129.00
price for USA
  • ISBN 978-3-642-30107-0
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $129.00
price for USA
  • ISBN 978-3-642-42686-5
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Rent the ebook  
  • Rental duration: 1 or 6 month
  • low-cost access
  • online reader with highlighting and note-making option
  • can be used across all devices
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Bibliographic Information

Bibliographic Information
Book Title
Photomodulated Optical Reflectance
Book Subtitle
A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon
Authors
Series Title
Springer Theses
Copyright
2012
Publisher
Springer-Verlag Berlin Heidelberg
Copyright Holder
Springer-Verlag Berlin Heidelberg
eBook ISBN
978-3-642-30108-7
DOI
10.1007/978-3-642-30108-7
Hardcover ISBN
978-3-642-30107-0
Softcover ISBN
978-3-642-42686-5
Series ISSN
2190-5053
Edition Number
1
Number of Pages
XXIV, 204
Topics