RWTHedition

Introduction to Microsystem Design

Authors: Schomburg, Werner Karl

  • Many tables with equations required for calculations of basic elements
  • Systematic description of most actuators and sensors in micro technique
  • Includes exercises Characteristic curves of most actuators and sensors
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eBook $159.00
price for USA (gross)
  • ISBN 978-3-642-19489-4
  • Digitally watermarked, DRM-free
  • Included format: PDF, EPUB
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Softcover $209.00
price for USA
  • ISBN 978-3-642-26852-6
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Rent the ebook  
  • Rental duration: 1 or 6 month
  • low-cost access
  • online reader with highlighting and note-making option
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About this book

The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important in micro systems.
For quick reference equations are presented in tables which are found in an index at the end of this book.

About the authors

Univ.-Prof. Dr. Werner Karl Schomburg was born in 1955 at Kiel, Germany. In 1983 he got his diploma in theoretical physics from Kiel University. He stayed at CERN in Geneva, Switzerland, for 3 month in 1982. He obtained his PhD from a university at Munich (LMU) in experimental nuclear physics in 1988. Until 2003 Prof. Schomburg was working at Karlsruhe Research Center, Institute of Micro Structure Technique. His group developed in this time the first micro pump, the first micro valve, and the first micro flow and micro pressure sensor from polymer. In 2004 he became a professor at RWTH Aachen University. From 2006 to 2009 he spent 3 weeks each year teaching at Tsinghua University in Beijing, China.

Table of contents (23 chapters)

Buy this book

eBook $159.00
price for USA (gross)
  • ISBN 978-3-642-19489-4
  • Digitally watermarked, DRM-free
  • Included format: PDF, EPUB
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Softcover $209.00
price for USA
  • ISBN 978-3-642-26852-6
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Rent the ebook  
  • Rental duration: 1 or 6 month
  • low-cost access
  • online reader with highlighting and note-making option
  • can be used across all devices
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Bibliographic Information

Bibliographic Information
Book Title
Introduction to Microsystem Design
Authors
Series Title
RWTHedition
Copyright
2011
Publisher
Springer-Verlag Berlin Heidelberg
Copyright Holder
Springer-Verlag Berlin Heidelberg
eBook ISBN
978-3-642-19489-4
DOI
10.1007/978-3-642-19489-4
Softcover ISBN
978-3-642-26852-6
Series ISSN
1865-0899
Edition Number
1
Number of Pages
XXII, 322
Topics