Springer Series in Materials Science

Rare-Earth Implanted MOS Devices for Silicon Photonics

Microstructural, Electrical and Optoelectronic Properties

Authors: Rebohle, Lars, Skorupa, Wolfgang

  • Summarizes the current knowledge in implanted rare earth materials
  • Includes structural microelectric device aspects
  • Serves as anĀ ideal reference work for researchers and engineers alike
see more benefits

Buy this book

eBook $139.00
price for USA (gross)
  • ISBN 978-3-642-14447-9
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $179.00
price for USA
  • ISBN 978-3-642-14446-2
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $179.00
price for USA
  • ISBN 978-3-642-26558-7
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
About this book

The book concentrates on the microstructural, electric and optoelectronic properties of rare-earth implanted MOS structures and their use as light emitters in potential applications. It describes the structural formation processes in the gate oxide during fabrication and under operation, how this microstructure development will affect the electrical device performance and how both microstructure and electrical characteristics determine the optoelectronic features of the light emitters. However, most of the discussed physical processes as well as the described fabrication methods and device characterization techniques are of general interest and are beyond the scope of this type of light emitter. The book will be of value to engineers, physicists, and scientists dealing either with Si based photonics in particular or optoelectronic device fabrication and characterization in general.

Table of contents (7 chapters)

Buy this book

eBook $139.00
price for USA (gross)
  • ISBN 978-3-642-14447-9
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $179.00
price for USA
  • ISBN 978-3-642-14446-2
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $179.00
price for USA
  • ISBN 978-3-642-26558-7
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Loading...

Recommended for you

Loading...

Bibliographic Information

Bibliographic Information
Book Title
Rare-Earth Implanted MOS Devices for Silicon Photonics
Book Subtitle
Microstructural, Electrical and Optoelectronic Properties
Authors
Series Title
Springer Series in Materials Science
Series Volume
142
Copyright
2010
Publisher
Springer-Verlag Berlin Heidelberg
Copyright Holder
Springer-Verlag Berlin Heidelberg
eBook ISBN
978-3-642-14447-9
DOI
10.1007/978-3-642-14447-9
Hardcover ISBN
978-3-642-14446-2
Softcover ISBN
978-3-642-26558-7
Series ISSN
0933-033X
Edition Number
1
Number of Pages
XVIII, 174
Number of Illustrations and Tables
117 b/w illustrations, 3 illustrations in colour
Topics