Microtechnology and MEMS

Design and Manufacturing of Active Microsystems

Editors: Büttgenbach, Stephanus, Burisch, Arne, Hesselbach, Jürgen (Eds.)

  • State-of-the-art design and application of electromagnetic microactuators
  • Newly developed microproduction technologies
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eBook $189.00
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  • ISBN 978-3-642-12903-2
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About this book

This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.

Table of contents (24 chapters)

  • Introduction

    Büttgenbach, S. (et al.)

    Pages 1-7

  • Electromagnetic Design of Microactuators

    Janssen, G. (et al.)

    Pages 11-28

  • Drive Systems Based on Electromagnetic Microactuators

    Ganesan, V. (et al.)

    Pages 29-47

  • Modular Computer Aided Design Environment for Active Microsystems

    Triltsch, U. (et al.)

    Pages 49-66

  • Wear Behavior in Microactuator Interfaces

    Bandorf, R. (et al.)

    Pages 69-88

Buy this book

eBook $189.00
price for USA (gross)
  • ISBN 978-3-642-12903-2
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $239.00
price for USA
  • ISBN 978-3-642-12902-5
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $239.00
price for USA
  • ISBN 978-3-642-26738-3
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Rent the ebook  
  • Rental duration: 1 or 6 month
  • low-cost access
  • online reader with highlighting and note-making option
  • can be used across all devices
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Bibliographic Information

Bibliographic Information
Book Title
Design and Manufacturing of Active Microsystems
Editors
  • Stephanus Büttgenbach
  • Arne Burisch
  • Jürgen Hesselbach
Series Title
Microtechnology and MEMS
Copyright
2011
Publisher
Springer-Verlag Berlin Heidelberg
Copyright Holder
Springer-Verlag Berlin Heidelberg
eBook ISBN
978-3-642-12903-2
DOI
10.1007/978-3-642-12903-2
Hardcover ISBN
978-3-642-12902-5
Softcover ISBN
978-3-642-26738-3
Series ISSN
1615-8326
Edition Number
1
Number of Pages
XII, 444
Topics