Thin Films Material Technology

Sputtering of Compound Materials

Authors: Wasa, Kiyotaka, Kitabatake, Makoto, Adachi, Hideaki

  • Reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering

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Softcover $219.00
price for USA
  • ISBN 978-3-642-05931-5
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
About this book

An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin film, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts.

Key topics: Principles and examples of making thin-film materials and devices such as nanometer composite thin films, nanometer superlattice of compound ceramics, micro-sensors and actuators, micro-MEMS, mobile compact/flexible ferroelectric memory, flat display including plasma display and PLD, and thin film catalysis, solar battery, and large-area functional window glass coating for energy and environmental uses; Covers techniques in automotive parts coatings :non-peel plastics coatings with metal, alloy, and compound films.

Reviews

From the reviews:

"The book starts by defining thin film materials and describing the basics of their nucleation and growth. … I found the book useful and would not hesitate to recommend it as essential reading to anyone who is entering the field of sputter deposition, particularly the deposition of compound materials." (Dr. Charles A. Bishop, Materials World, Vol. 14 (10), 2006)


Buy this book

Softcover $219.00
price for USA
  • ISBN 978-3-642-05931-5
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.

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Bibliographic Information

Bibliographic Information
Book Title
Thin Films Material Technology
Book Subtitle
Sputtering of Compound Materials
Authors
Copyright
2004
Publisher
Springer-Verlag Berlin Heidelberg
Copyright Holder
Springer-Verlag Berlin Heidelberg
Distribution Rights
Distribution rights for USA: William Andrew Publishing, Norwich, NY, USA
Softcover ISBN
978-3-642-05931-5
Edition Number
1
Number of Pages
XIV, 518
Additional Information
Jointly published with William Andrew Publishing, Norwich, NY, USA
Topics