Design for Manufacturability with Advanced Lithography

Authors: Yu, Bei, Pan, David Z

  • Enables readers to tackle the challenge of layout decompositions for different patterning techniques
  • Presents a coherent framework, including standard cell compliance and detailed placement, to enable Triple Patterning Lithography (TPL) friendly design
  • Includes coverage of the design for manufacturability with E-Beam lithography
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eBook $74.99
price for USA (gross)
  • ISBN 978-3-319-20385-0
  • Digitally watermarked, DRM-free
  • Included format: PDF, EPUB
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $99.00
price for USA
  • ISBN 978-3-319-20384-3
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $99.00
price for USA
  • ISBN 978-3-319-37393-5
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
About this book

This book introduces readers to the most advanced research results on Design for Manufacturability (DFM) with multiple patterning lithography (MPL) and electron beam lithography (EBL). The authors describe in detail a set of algorithms/methodologies to resolve issues in modern design for manufacturability problems with advanced lithography. Unlike books that discuss DFM from the product level or physical manufacturing level, this book describes DFM solutions from a circuit design level, such that most of the critical problems can be formulated and solved through combinatorial algorithms.

Table of contents (6 chapters)

  • Introduction

    Yu, Bei (et al.)

    Pages 1-6

  • Layout Decomposition for Triple Patterning

    Yu, Bei (et al.)

    Pages 7-51

  • Layout Decomposition for Other Patterning Techniques

    Yu, Bei (et al.)

    Pages 53-82

  • Standard Cell Compliance and Placement Co-Optimization

    Yu, Bei (et al.)

    Pages 83-109

  • Design for Manufacturability with E-Beam Lithography

    Yu, Bei (et al.)

    Pages 111-157

Buy this book

eBook $74.99
price for USA (gross)
  • ISBN 978-3-319-20385-0
  • Digitally watermarked, DRM-free
  • Included format: PDF, EPUB
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $99.00
price for USA
  • ISBN 978-3-319-20384-3
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $99.00
price for USA
  • ISBN 978-3-319-37393-5
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
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Bibliographic Information

Bibliographic Information
Book Title
Design for Manufacturability with Advanced Lithography
Authors
Copyright
2016
Publisher
Springer International Publishing
Copyright Holder
Springer International Publishing Switzerland
eBook ISBN
978-3-319-20385-0
DOI
10.1007/978-3-319-20385-0
Hardcover ISBN
978-3-319-20384-3
Softcover ISBN
978-3-319-37393-5
Edition Number
1
Number of Pages
XI, 164
Topics